薄玻璃覆盖约束飞秒激光烧蚀恒弹合金的实验研究

发布时间：2018-02-25 02:23

本文关键词： 飞秒激光脉冲烧蚀刻槽烧蚀恒弹合金表面形貌　出处：《应用激光》2017年03期 　论文类型：期刊论文

【摘要】：恒弹性合金因其在一定温度范围内弹性模量几乎不随温度变化的特点,在精密仪器仪表等制造领域应用越来越广泛,其表面加工的要求也越来越高。为研究飞秒激光在不同加工环境下对恒弹性合金的烧蚀情况,对比了两种加工条件不同的烧蚀实验。空气环境中;用150μm薄玻璃片压贴在样品表面,烧蚀方式分为定点烧蚀和刻槽两种,用共聚焦显微镜和扫描电镜测量了烧蚀后的恒弹合金形貌。结果表明,采用定点烧蚀的加工方式时,相同激光参数下,空气中烧蚀坑的直径最小,深度最大;玻璃片约束下的坑的直径最大,深度最小,当激光能量为50μJ,脉冲数为100个时,该约束下烧蚀坑的深度缩减量可达44.0%。采用刻槽的加工方式时,在空气中的槽的深度大,宽度较大,在玻璃片的约束下,加工的槽的深度和宽度都减小,当激光能量为50μJ、扫描速度为1.5mm/s时,其深度缩减量可达47.2%。
[Abstract]:Constant-elastic alloys are widely used in manufacturing fields such as precision instruments because their modulus of elasticity almost does not change with temperature in a certain temperature range. In order to study the ablation of constant-elastic alloy by femtosecond laser in different working environment, two ablation experiments with different processing conditions were carried out. A 150 渭 m thin glass sheet was pressed on the surface of the sample. The ablation methods were divided into two types: fixed point ablation and groove etching. The morphology of the ablated constant elastic alloy was measured by confocal microscope and scanning electron microscope. The results showed that when the fixed point ablation method was used, the morphology of the ablated alloy was measured by means of confocal microscope and scanning electron microscope. At the same laser parameters, the ablation pits in air have the smallest diameter and the largest depth, and the holes confined by glass are the largest in diameter and the smallest in depth, when the laser energy is 50 渭 J and the number of pulses is 100, The depth reduction of the ablation pit under this constraint can be up to 44.0.The depth and width of the slot in the air are large and the width of the groove is decreased under the constraint of glass sheet. When the laser energy is 50 渭 J and the scanning speed is 1.5 mm / s, the depth reduction can reach 47.2.
【作者单位】：中南大学高性能复杂制造国家重点实验室;
【基金】：国家自然科学基金资助项目(项目编号:51475481,51475482,51335011) 教育部“新世纪优秀人才支持计划”资助项目(项目编号:NCET-12-0548)
【分类号】：TG135.2;TN249

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