基于变速扫描技术的大尺寸台阶测量（英文）

发布时间：2018-02-28 14:27

  本文关键词： 白光干涉 变速扫描 台阶标准样板　出处：《红外与激光工程》2017年07期 　论文类型：期刊论文

【摘要】：为了提高大尺寸台阶结构的单边测量精度、缩短测量时间,基于变速扫描技术,并利用傅里叶变换提取法及单边台阶评价算法进行扫描干涉信号的处理,提出并搭建了具有变速扫描功能的白光干涉测量系统。并且利用该系统对标称值为9.976±0.028μm的台阶标准样板进行了测量,10次重复性测量结果为9.971μm,标准偏差量为0.007μm,测量时间仅为35 s,远小于常规扫描方法的222 s,大大缩短了测量时间,因此说明了该系统在大尺寸台阶结构测量中,具有较高的精确性与高效性。
[Abstract]:In order to improve the accuracy and shorten the measuring time of large scale step structure, the scanning interference signal is processed by Fourier transform extraction method and single step evaluation algorithm based on variable speed scanning technology. A white light interferometry system with variable speed scanning function is proposed and built, and 10 times repeatability measurement results are 9.971 渭 m, 0.007 渭 m and 0.007 渭 m for the step standard template with a nominal value of 9.976 卤0.028 渭 m. The interval is only 35 s, which is much smaller than that of the conventional scanning method (222 s), which greatly shortens the measuring time. Therefore, the system has high accuracy and efficiency in large scale step structure measurement.
【作者单位】： 上海市计量测试技术研究院;
【基金】：financially supported by national key scientific instrument and equipment development projects of China (2014YQ090709)~~
【分类号】：O436.1
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本文编号：1547673