基于聚焦物镜与PSD的激光对中测量方法研究

发布时间：2018-04-13 23:25

本文选题：轴对中 + 激光对中　；参考：《应用光学》2017年02期

【摘要】：针对传统激光对中方法数学模型复杂、求解困难的不足,提出一种基于聚焦物镜与PSD的激光对中测量方法。该方法利用光学系统中视场与焦距的关系以及相似三角形的原理得到不对中的角度偏差和平行偏差,测量原理简单,求解方便。实验结果表明,当平行偏量和角度偏量的测量范围分别为0.5mm~1.5mm,0.047 7°~0.143 2°时,平行偏量测量误差范围为0.035mm~0.207mm,角度测量误差范围为0.000 2°~0.012 8°。最后对系统测量误差进行分析并提出一种消除安装误差影响的方法,给出了计算公式。
[Abstract]:A laser alignment measurement method based on focusing objective lens and PSD is proposed to solve the problem of complex mathematical model of traditional laser alignment method.This method uses the relation between the field of view and the focal length in the optical system and the principle of similar triangle to get the angle deviation and parallel deviation in the misalignment. The measuring principle is simple and the solution is convenient.The experimental results show that when the measurement range of parallel deviation and angle deviation is 0.5mm / 1.5mm / 0.047 掳/ 0.143 2 掳, the error range of parallel deviation is 0.035mm / 0.207mm, and the error range of angle measurement is 0.000 掳/ 0.0128 掳respectively.Finally, the measurement error of the system is analyzed and a method to eliminate the influence of installation error is put forward, and the calculation formula is given.
【作者单位】：中国科学院深圳先进技术研究院;香港中文大学;深圳生物医学光电传感技术工程实验室;深圳市亚泰光电技术有限公司;
【基金】：深圳市科技计划项目(CXZZ20140609162846202)
【分类号】：TN24

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