干涉测量圆柱内表面的失调误差分析

发布时间：2018-05-31 23:21

  本文选题：测量 + 菲佐干涉测量　； 参考：《光学学报》2017年01期

【摘要】：通过菲佐型干涉系统、直角圆锥反射镜的一次性测量,可获得圆柱形光学元件整周的面形信息。为实现高精度的面形测量,实验装置的校准至关重要,但由于调整机构的缺陷导致圆锥反射镜和被测圆柱的空间方位难以确定,距离理想位置的任何位置偏差将给测量结果引入严重的测量误差。为去除该系统误差,要明确各种失调误差的形成原因,分析其对测量结果的影响。通过圆柱坐标系下数学模型的建立,推导出偏移误差和旋转误差的变化公式,并通过Matlab数值模拟和实际测量对其进行验证。结果表明,利用误差计算公式可以推导出失调误差系数,便于进一步的系统误差校正。
[Abstract]:Through the one-off measurement of right angle conical mirror with Fizzo interferometer, the whole circumference information of cylindrical optical element can be obtained. In order to achieve high precision surface shape measurement, the calibration of the experimental device is very important. However, due to the defects of the adjusting mechanism, it is difficult to determine the spatial orientation of the cone reflector and the cylinder to be measured. Any position deviation from the ideal position will introduce serious measurement errors to the measurement results. In order to remove the system error, it is necessary to make clear the causes of the misalignment error and analyze its influence on the measurement results. Through the establishment of mathematical model in cylindrical coordinate system, the variation formulas of offset error and rotation error are deduced, and verified by Matlab numerical simulation and actual measurement. The results show that the misalignment error coefficient can be deduced by using the error calculation formula, which is convenient for further systematic error correction.
【作者单位】： 长春理工大学光电工程学院;苏州慧利仪器有限责任公司;上海理工大学光电信息与计算机工程学院;
【基金】：国家科技重大专项(2013YQ150829) 上海市科研计划项目(14140502500) 苏州市纳米专项(ZXG2013034)
【分类号】：O436.1
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本文编号：1961772