Duhocamis放电特性之空心阴极与热阴极的协同效应

发布时间：2018-07-08 21:04

本文选题：离子源 + 金属离子束　；参考：《中国表面工程》2017年04期

【摘要】：Duhocamis(双空心阴极金属离子源)是在GSI间热阴极PIG离子源基础上,利用空心阴极圆筒取代空心阳极圆筒,磁镜场取代均匀磁场的强流金属离子源。通过系列变化空心阴极与间热阴极电源电压的弧放电试验,了解其对离子源工作及金属等离子体形成的贡献和影响。试验结果分别给出了空心阴极与间热阴极弧放电特性曲线,它们的弧压对弧流关系具有不同的弧阻抗特性;通过磁分析器对等离子体中各种离子成分比例的分析,进一步显示出空心阴极与间热阴极弧放电两者相互强化和联动的协同效应;尤其空心阴极电位从零开始变化的弧放电试验,揭示了离子源从PIG空心阳极放电向双空心阴极放电转换的过程;协同效应不仅证实空心阴极作为赖以产生金属离子的溅射电极,而且对于确立离子源工作模式与优化产生所需金属离子的放电条件至关重要。
[Abstract]:Duhocamis (double hollow cathode metal ion source) is a high current metal ion source based on the GSI hot cathode big ion source. The hollow cathode cylinder replaces the hollow anode cylinder and the magnetic mirror field replaces the uniform magnetic field. Through a series of arc discharge tests with varying voltage of hollow cathode and interspace thermal cathode, the contribution and influence of the arc discharge on the work of ion source and the formation of metal plasma were investigated. The experimental results show that the arc discharge characteristic curves of hollow cathode and interspace thermal cathode have different arc impedance characteristics of arc voltage to arc current, and the ratio of various ion components in plasma is analyzed by magnetic analyser. Furthermore, the synergistic effect between the hollow cathode and the inter-thermal cathode arc discharge is demonstrated, especially the arc discharge experiment in which the hollow cathode potential changes from zero. The conversion process of ion source from the discharge of the pig hollow anode to the discharge of the double hollow cathode is revealed, and the synergistic effect not only proves that the hollow cathode is used as the sputtering electrode on which metal ions are produced, Moreover, it is very important to establish the working mode of ion source and to optimize the discharge conditions of metal ions.
【作者单位】：北京大学重离子物理研究所;北京大学核物理与核技术国家重点实验室;
【基金】：国家自然科学基金(11475011)~~
【分类号】：O461

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