不同气体组分的PS-PVD射流光谱诊断
发布时间：2018-10-17 20:09
【摘要】：采用发射光谱分析不同气体组分的等离子喷涂-物理气相沉积(PS-PVD)射流,通过Abel转换得出射流径向各点处的光谱强度,比较和分析射流中不同气体的成分分布。采用多谱线斜率法研究不同气体组分的射流在径向距离上电子温度的变化,通过Hβ谱线的stark展宽计算径向上电子密度的分布。结果表明:Ar/H_2气体中,H_2在焰流中心区域(0~30mm)分布较为均匀,但在焰流中心稍靠外的区域(30~60mm)随着径向距离的增加而增加;加入He后,Ar和H_2在焰流中心处浓度较低并在一定范围内随着径向距离的增加而增加,He往焰流中心聚集;不同气体组分的电子温度和电子密度随着径向距离的增加而降低,同时受到H_2和He的影响。
[Abstract]:The plasma spray-physical vapor deposition (PS-PVD) jet with different gas components was analyzed by emission spectrum. The spectral intensity at the radial points of the jet was obtained by Abel conversion, and the composition distribution of different gases in the jet was compared and analyzed. The variation of electron temperature in radial distance of jet with different gas components was studied by multi-spectral slope method. The distribution of electron density in radial direction was calculated by stark broadening of H 尾 spectral line. The results show that the distribution of H _ 2 in Ar/H_2 gas is more uniform in the central flame flow region (0~30mm), but in the area slightly outside the flame flow center (30~60mm) increases with the increase of radial distance. After the addition of He, the concentration of Ar and H _ 2 in the center of the flame flow is lower and increases with the increase of radial distance in a certain range, and the He accumulates to the center of the flame flow, and the electron temperature and electron density of different gas components decrease with the increase of radial distance. At the same time, it was affected by Hap2 and He.
【作者单位】： 中南大学材料科学与工程学院;广东省新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室;
【基金】：广东省对外合作项目(2013B050800027) 广州市对市合作项目(201508030001) 广东省科学院平台建设项目(2016GDASPT-0206,2016GDASPT-0317)资助
【分类号】：O53
，
本文编号：2277821
[Abstract]:The plasma spray-physical vapor deposition (PS-PVD) jet with different gas components was analyzed by emission spectrum. The spectral intensity at the radial points of the jet was obtained by Abel conversion, and the composition distribution of different gases in the jet was compared and analyzed. The variation of electron temperature in radial distance of jet with different gas components was studied by multi-spectral slope method. The distribution of electron density in radial direction was calculated by stark broadening of H 尾 spectral line. The results show that the distribution of H _ 2 in Ar/H_2 gas is more uniform in the central flame flow region (0~30mm), but in the area slightly outside the flame flow center (30~60mm) increases with the increase of radial distance. After the addition of He, the concentration of Ar and H _ 2 in the center of the flame flow is lower and increases with the increase of radial distance in a certain range, and the He accumulates to the center of the flame flow, and the electron temperature and electron density of different gas components decrease with the increase of radial distance. At the same time, it was affected by Hap2 and He.
【作者单位】： 中南大学材料科学与工程学院;广东省新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室;
【基金】：广东省对外合作项目(2013B050800027) 广州市对市合作项目(201508030001) 广东省科学院平台建设项目(2016GDASPT-0206,2016GDASPT-0317)资助
【分类号】：O53
，
本文编号：2277821
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