中阶梯光栅衍射效率及杂散光检测系统设计
发布时间：2018-11-17 15:37
【摘要】：中阶梯光栅具有刻线密度低、闪耀角度大、衍射级次高、光谱范围宽、色散率大、光谱分辨率高等一系列突出优点,近年来由于其优良的性能而倍受青睐。作为评价中阶梯光栅质量的衍射效率和杂散光系数直接体现了中阶梯光栅的光学性能,能够准确地进行中阶梯光栅衍射效率和杂散光系数的测量是光栅应用的前提。鉴于此,基于中阶梯光栅的衍射理论创造性地提出用一套系统对中阶梯光栅的衍射效率和杂散光系数进行检测,该系统引入双轨结构,具有结构简单新颖、一机多能等优点。通过理论分析和计算,确定了检测系统的结构参数,设计结果表明:该检测系统可用于测量190~1 100nm光谱范围内的中阶梯光栅绝对衍射效率,同时也可用于测量200~800nm光谱范围内的中阶梯光栅杂散光系数,实现了将衍射效率测量和杂散光测量集于一体的设计思想。
[Abstract]:The middle step grating has a series of outstanding advantages, such as low line density, large blazing angle, high diffraction order, wide spectrum range, large dispersion rate, high spectral resolution and so on. In recent years, it has attracted much attention because of its excellent performance. The diffraction efficiency and the stray light coefficient of the middle step grating directly reflect the optical performance of the middle step grating, and it is the premise of the grating application that the diffraction efficiency and the stray light coefficient of the middle step grating can be accurately measured. In view of this, based on the diffraction theory of middle step grating, a set of system is creatively proposed to detect the diffraction efficiency and stray light coefficient of the middle step grating. The system introduces a dual-track structure, which has the advantages of simple and novel structure, multifunction of one machine, and so on. Through theoretical analysis and calculation, the structural parameters of the detection system are determined. The design results show that the system can be used to measure the absolute diffraction efficiency of the middle step grating in the spectrum range of 190-1 100nm. At the same time, it can also be used to measure the stray light coefficient of the middle step grating in the range of 200~800nm spectrum. The design idea of integrating the measurement of diffraction efficiency and the measurement of stray light is realized.
【作者单位】： 中国科学院长春光学精密机械与物理研究所;中国科学院大学;
【基金】：国家重大科学仪器设备开发专项项目(2014YQ12035102)资助
【分类号】：O436.1;TH744.1
本文编号：2338327
[Abstract]:The middle step grating has a series of outstanding advantages, such as low line density, large blazing angle, high diffraction order, wide spectrum range, large dispersion rate, high spectral resolution and so on. In recent years, it has attracted much attention because of its excellent performance. The diffraction efficiency and the stray light coefficient of the middle step grating directly reflect the optical performance of the middle step grating, and it is the premise of the grating application that the diffraction efficiency and the stray light coefficient of the middle step grating can be accurately measured. In view of this, based on the diffraction theory of middle step grating, a set of system is creatively proposed to detect the diffraction efficiency and stray light coefficient of the middle step grating. The system introduces a dual-track structure, which has the advantages of simple and novel structure, multifunction of one machine, and so on. Through theoretical analysis and calculation, the structural parameters of the detection system are determined. The design results show that the system can be used to measure the absolute diffraction efficiency of the middle step grating in the spectrum range of 190-1 100nm. At the same time, it can also be used to measure the stray light coefficient of the middle step grating in the range of 200~800nm spectrum. The design idea of integrating the measurement of diffraction efficiency and the measurement of stray light is realized.
【作者单位】： 中国科学院长春光学精密机械与物理研究所;中国科学院大学;
【基金】：国家重大科学仪器设备开发专项项目(2014YQ12035102)资助
【分类号】：O436.1;TH744.1
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