基于一维电子平衡流体模型的平行板离子引出数值模拟

发布时间：2018-11-21 18:24

【摘要】：离子引出是一个涉及多粒子相互作用、多物理场耦合的复杂物理过程,研究引出过程中不同参数对于引出特性的影响,对于优化离子引出过程的工艺参数具有一定的指导意义。为此基于描述非平衡等离子体输运特性的物理数学模型,推导了描述金属等离子体引出过程中各组分运动规律的一维电子平衡流体模型,并通过与解析解和实验测量结果的对比验证了所发展的物理数学模型和计算机程序代码的正确性。在此基础上,系统研究了不同工况下等离子体鞘层的时空演化特性以及离子引出时间和引出效率。结果表明:等离子体初始密度较高时,引出过程中存在显著的屏蔽效应;引出电压、电子温度的升高或极板间距的减小都将缩短引出时间;考虑共振电荷转移过程得到的离子引出时间与无碰撞条件下的离子引出时间相差不大,但共振电荷转移会导致目标离子损失。
[Abstract]:Ion extraction is a complex physical process involving multi-particle interaction and multi-physical field coupling. The study of the influence of different parameters on the extraction characteristics in the extraction process has certain guiding significance for optimizing the process parameters of ion extraction process. Based on the physical mathematical model to describe the transport characteristics of non-equilibrium plasma, a one-dimensional electron equilibrium fluid model is derived to describe the movement of each component in the extraction process of metal plasma. The correctness of the developed physical mathematical model and computer program code is verified by comparison with analytical solution and experimental results. On this basis, the temporal and spatial evolution characteristics, ion extraction time and extraction efficiency of the plasma sheath under different operating conditions were systematically studied. The results show that there is a significant shielding effect in the extraction process when the plasma initial density is high, and the extraction time will be shortened with the increase of the extraction voltage, the increase of the electron temperature or the decrease of the plate spacing. The ion extraction time obtained by considering the resonant charge transfer process is similar to that of the ion extraction time without collision, but the resonant charge transfer will lead to the loss of the target ion.
【作者单位】： 清华大学工程物理系;核工业理化工程研究院;
【分类号】：O53
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本文编号：2347884