二极管激光吸收光谱法对低气压介质阻挡放电等离子体中氩的亚稳态的诊断
发布时间：2018-11-28 20:16
【摘要】：利用可调谐二极管激光吸收光谱技术对低气压氩气介质阻挡放电等离子体进行诊断,重点考察了Ar亚稳态1s_5和1s_3的数密度和气体温度随放电电压,气压,流量,极板间距,以及随N_2配比的变化情况。实验基于朗伯-比尔(Lambert-Beer)定律,通过计算吸收谱线的吸收峰面积求取Ar亚稳态的数密度,同时对谱线进行Voigt拟合得到多普勒展宽,进而求出气体温度。Ar亚稳态主要由电子碰撞产生,但同时电子也会碰撞亚稳态发生猝灭作用,从而使数密度减少;气体温度则与等离子体的实际功率、电子的状态以及粒子之间的碰撞有关。实验结果表明在本实验条件范围内,Ar亚稳态数密度和气体温度随放电电压和流量的增大都先增大,之后逐渐趋于平缓,但两者随流量的变化幅度都较之随放电电压的小,增长较缓慢。随气压的升高,Ar亚稳态数密度和气体温度先增加并达到一个极大值,而之后逐渐降低。实验数据表明,气压对谱线展宽有较明显的影响作用。适当增大极板间距,Ar亚稳态数密度明显降低,但气体温度却有所升高。N_2的加入对亚稳态有很强的猝灭作用,0.5%的N_2就会使数密度下降50%,但随着N_2浓度的进一步增大,其数密度不再明显降低。
[Abstract]:The low pressure argon dielectric barrier discharge plasma was diagnosed by tunable diode laser absorption spectroscopy. The numerical density and gas temperature of Ar metastable 1s_5 and 1s_3 with discharge voltage, pressure and flow rate were investigated. The distance between the plates and the change of the ratio of N to 2. Based on Lambert-Beer 's law, the number density of Ar metastable state is obtained by calculating the absorption peak area of the absorption line, and the Doppler broadening is obtained by fitting the spectrum line with Voigt. The Ar metastable state is mainly produced by electron collision, but at the same time, the electron will also quench the metastable state, thus reducing the number density. The temperature of the gas depends on the actual power of the plasma, the state of the electron and the collisions between particles. The experimental results show that the metastable number density and gas temperature of Ar increase firstly with the increase of discharge voltage and flow rate, and then tend to be flat gradually, but the variation range of them with discharge voltage is smaller than that with discharge voltage. Growth is slower. With the increase of atmospheric pressure, the Ar metastable number density and gas temperature first increase and reach a maximum value, and then decrease gradually. The experimental data show that the pressure has an obvious effect on the spectral line broadening. When the plate spacing is increased properly, the metastable number density of Ar decreases obviously, but the gas temperature increases. The addition of NSP _ 2 has a strong quenching effect on the metastable state, and 0.5% NSP _ 2 can decrease the number density by 50%. However, with the further increase of NSCL _ 2 concentration, the number density of NSCL _ 2 is no longer significantly decreased.
【作者单位】： 大连理工大学物理与光电工程学院三束材料表面改性教育部重点实验室;
【基金】：国家自然科学基金项目(10975029)资助
【分类号】：O53;O461
[Abstract]:The low pressure argon dielectric barrier discharge plasma was diagnosed by tunable diode laser absorption spectroscopy. The numerical density and gas temperature of Ar metastable 1s_5 and 1s_3 with discharge voltage, pressure and flow rate were investigated. The distance between the plates and the change of the ratio of N to 2. Based on Lambert-Beer 's law, the number density of Ar metastable state is obtained by calculating the absorption peak area of the absorption line, and the Doppler broadening is obtained by fitting the spectrum line with Voigt. The Ar metastable state is mainly produced by electron collision, but at the same time, the electron will also quench the metastable state, thus reducing the number density. The temperature of the gas depends on the actual power of the plasma, the state of the electron and the collisions between particles. The experimental results show that the metastable number density and gas temperature of Ar increase firstly with the increase of discharge voltage and flow rate, and then tend to be flat gradually, but the variation range of them with discharge voltage is smaller than that with discharge voltage. Growth is slower. With the increase of atmospheric pressure, the Ar metastable number density and gas temperature first increase and reach a maximum value, and then decrease gradually. The experimental data show that the pressure has an obvious effect on the spectral line broadening. When the plate spacing is increased properly, the metastable number density of Ar decreases obviously, but the gas temperature increases. The addition of NSP _ 2 has a strong quenching effect on the metastable state, and 0.5% NSP _ 2 can decrease the number density by 50%. However, with the further increase of NSCL _ 2 concentration, the number density of NSCL _ 2 is no longer significantly decreased.
【作者单位】： 大连理工大学物理与光电工程学院三束材料表面改性教育部重点实验室;
【基金】：国家自然科学基金项目(10975029)资助
【分类号】：O53;O461
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