基于谱域相位分辨光学相干层析的纳米级表面形貌成像

发布时间：2019-04-16 00:19

【摘要】：提出了一种基于谱域相位分辨光学相干层析的纳米级表面形貌成像方法,由干涉光谱计算样品相邻两点的相位差,得到样品表面相位差分图,经过积分,重建样品表面形貌的定量分布.当相邻两点相位差的绝对值小于π,不产生相位包裹,避免了目前的干涉法相位解包裹存在的问题,将干涉法相邻两点相位差绝对值的限制条件由目前的π扩大到2π,提高了干涉法表面形貌成像的适用范围.参考面和样品置于同一平台之上,消除环境干扰及系统振动的影响,噪声幅度小于0.3 nm.通过对光学分辨率片及表面粗糙度标准样板的表面形貌成像,对本方法进行了验证,系统的轴向分辨率优于1 nm.
[Abstract]:Based on the phase resolved optical coherence tomography in spectral domain, an imaging method of nanometer surface topography is proposed. The phase difference between two adjacent points of the sample is calculated by the interferometric spectrum, and the phase difference map of the sample surface is obtained, and the phase difference of the sample surface is obtained by integration. The quantitative distribution of the surface morphology of the samples was reconstructed. When the absolute value of the phase difference between two adjacent points is less than 蟺, there is no phase wrapping, which avoids the problem of phase unwrapping in the current interferometric method. The limit of the absolute phase difference between adjacent two points in the interferometric method is expanded from 蟺 to 2 蟺. The application range of interferometric surface topography imaging is improved. The reference plane and sample are placed on the same platform to eliminate the influence of environmental interference and system vibration. The noise amplitude is less than 0.3 nm.. The method is verified by imaging the surface topography of the optical resolution film and the standard template of surface roughness. The axial resolution of the system is better than 1 nm..
【作者单位】：东北大学秦皇岛分校控制工程学院;燕山大学电气工程学院;
【基金】：国家自然科学基金(批准号:61275214,31170956) 河北省自然科学基金(批准号:A2015501065,H2015501133)资助的课题~~
【分类号】：O439

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