基于信号处理方法的微机械陀螺误差补偿技术的研究

发布时间：2018-01-09 11:30

  本文关键词：基于信号处理方法的微机械陀螺误差补偿技术的研究　出处：《华侨大学》2016年硕士论文　论文类型：学位论文

  更多相关文章： 微机械陀螺仪 Simulink模型 ANSYS模型 正交误差 同相误差

【摘要】：微机械陀螺仪以其在军用和民用这两个方面的应用潜力,逐渐成为众多机构的重点研究方向,而静电驱动电容式微机械陀螺又以其结构简单、灵敏度高、温度漂移低等优点成为研究热点之一。但微机械陀螺传感器存在着各种非理想效应,其中静电驱动电容式微机械陀螺主要包括正交误差和同相误差这两种非理想效应,这两种非理想效应会严重制约微机械陀螺仪的性能。首先,在理论上了解微机械陀螺仪非理想效应产生的根本原因后,本文用ANSYS软件分别建立双质量块微机械陀螺仪模型和全对称结构微机械陀螺仪模型,仿真这两种陀螺仪中非理想效应产生的原理,通过陀螺仪理想状态模型和存在非理想效应模型的仿真我们可以看到陀螺仪工作时候的内部运动状态,以及对比分析陀螺仪非理想效应对其性能产生的影响,仿真结果表明这两种非理想效应都会对微机械陀螺仪中心模块的运动产生影响,正交误差使微机械陀螺仪中心模块偏离理想位置的幅度远大于同相误差产生的影响。其次,本文分析了两种结构微机械陀螺仪正交误差、同相误差产生的原因,根据分析的结果修改了微机械陀螺仪在驱动方向和检测方向上的动力学方程,根据微机械陀螺仪动力学方程分别建立理想情况、只存在同相误差时、只存在正交误差时和同时存在两种误差时的Simulink模型并进行仿真。Simulink模型的仿真结果显示,正交误差是微机械陀螺仪的主要干扰误差,对陀螺仪性能有很大影响,而同相误差的影响极其微弱,可以忽略不计。最后,本文基于微机械陀螺仪角速度信号提取原理,分析非理想效应产生的干扰信号和有用角速度信号之间的区别,提出了分别消除微机械陀螺仪正交误差和同相误差产生的影响的方案,并将方案进行综合,使之可以同时消除正交误差和同相误差产生的影响,之后用MATLAB对方案进行仿真,仿真结果表明该方案可以有效抑制这两种非理想效应产生的影响。本文研究成果有望大幅度提高微机械陀螺传感器系统的整体性能,对于推动微机械陀螺传感器的研究事业发展,加速其产业化进程具有重要作用。
[Abstract]:Micromachined gyroscope (MSG) has become the key research direction of many institutions for its potential application in both military and civil fields, while electrostatic driven capacitive micromachined gyroscope (MSG) is characterized by its simple structure and high sensitivity. The advantages of low temperature drift have become one of the research hotspots, but there are various non-ideal effects in the micro-mechanical gyroscope sensor. The electrostatic driven capacitive micromachined gyroscope mainly includes two kinds of non-ideal effects, orthogonal error and in-phase error. These two non-ideal effects will seriously restrict the performance of micro-mechanical gyroscope. First of all. After understanding the fundamental causes of the non-ideal effect of micromachined gyroscopes in theory, a two-mass micromechanical gyroscope model and an all-symmetric micromachined gyroscope model are established by using ANSYS software. Through the simulation of the ideal state model and the non-ideal effect model of the gyroscope, we can see the internal motion state of the gyroscope. The simulation results show that both of the two non-ideal effects will affect the motion of the center module of the micro-mechanical gyroscope. The quadrature error causes the center module of micromachined gyroscope to deviate from the ideal position much more than the influence of the in-phase error. Secondly, this paper analyzes the causes of the orthonormal error and the in-phase error of two kinds of micromachined gyroscopes. According to the results of the analysis, the dynamic equations of the micromachined gyroscopes in the driving direction and the detecting direction are modified. According to the dynamic equations of the micromachined gyroscopes, the ideal conditions are established, and only the in-phase errors exist. When there are only orthogonal errors and two kinds of errors at the same time, the Simulink model is simulated. Orthogonal error is the main interference error of micromachined gyroscope, which has great influence on the performance of gyroscope, but the effect of in-phase error is very weak, which can be ignored. Based on the principle of extracting angular velocity signals from micromachined gyroscopes, this paper analyzes the difference between the interference signals produced by non-ideal effects and the useful angular velocity signals. A scheme to eliminate the effects of orthogonal and in-phase errors on micromachined gyroscopes is proposed, and the scheme is synthesized to eliminate the effects of orthogonal errors and in-phase errors at the same time. Then the scheme is simulated with MATLAB. Simulation results show that the proposed scheme can effectively suppress the effects of these two non-ideal effects. The research results in this paper are expected to greatly improve the overall performance of micro-mechanical gyroscope sensor system. It plays an important role in promoting the research of micro-mechanical gyroscope sensor and accelerating its industrialization.
【学位授予单位】：华侨大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TN96
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本文编号：1401236