射频阻抗自动匹配方法的研究与设计

发布时间：2018-06-30 11:21

本文选题：射频源 + 阻抗匹配　；参考：《电光与控制》2017年12期

【摘要】：受工作环境和时间的影响射频负载阻抗在工作时是不断变化的,影响射频源的输出功率和工作效率。因此,需要在射频源和负载之间构造匹配网络,并且能够实时跟踪负载阻抗的变化,对匹配网络元件的参数做出相应调整,使射频源能够实现最大功率输出。根据射频源负载变化特点选择Γ型匹配网络,利用Smith圆图的变化规律控制匹配网络可调元件变化的约束规律。实现方式是由罗氏线圈和电容分压器检测传输线上的电流和电压信号,输入AD8302幅相检测电路得到信号幅度比和相位差;经过模数转换输入STM32;根据Smith圆图的阻抗和导纳的变化特点,采用PID算法控制步进电机的转角和转向,由此形成全新的闭环控制系统。由实验和仿真结果可知,此种匹配方法能够使电路在5 s内实现快速匹配,并且使误差控制在3°以内。
[Abstract]:Under the influence of working environment and time, the RF load impedance is constantly changing, which affects the output power and working efficiency of the RF source. Therefore, it is necessary to construct a matching network between the RF source and the load, and to track the load impedance in real time and adjust the parameters of the matching network element accordingly, so that the RF source can achieve the maximum power output. According to the characteristics of RF source load variation, 螕 type matching network is selected, and the changing law of Smith circle diagram is used to control the constraint law of the variable element of matching network. The current and voltage signals on the transmission line are detected by Roche coil and capacitor divider, and the amplitude ratio and phase difference of the signal are obtained by input AD8302 amplitude phase detection circuit. According to the characteristic of impedance and admittance of Smith circle, pid algorithm is used to control the rotation angle and steering of stepping motor, and a new closed-loop control system is formed. The experimental and simulation results show that this matching method can make the circuit match quickly within 5 seconds, and the error can be controlled within 3 掳.
【作者单位】：郑州大学信息工程学院;商丘职业技术学院;
【分类号】：TN86

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