基于静电平行板驱动器的MEMS变形镜特性分析

发布时间：2018-01-06 13:42

本文关键词：基于静电平行板驱动器的MEMS变形镜特性分析　出处：《半导体光电》2015年05期 　论文类型：期刊论文

【摘要】：静电平行板驱动器是基于静电驱动的MEMS变形镜的关键部件,其静态及动态性能对MEMS变形镜有重要影响。设计并利用表面硅工艺加工制作了三种基于不同弹性系数的静电平行板驱动器的MEMS变形镜,分别采用解析公式和有限元仿真方法分析了弹性系数对变形镜的三项性能参数即行程、吸合电压和固有频率的影响,并利用白光表面轮廓仪进行实验测试,验证了理论和仿真结果的有效性。实验结果表明三种变形镜中半圆环梁驱动器变形镜具有适中的吸合电压和较大的行程,最适合于自适应光学系统的应用需求。
[Abstract]:Electrostatic parallel plate driver is a key component of MEMS deformable mirror based on electrostatic drive. Its static and dynamic properties have important influence on MEMS deformable mirror. Three kinds of MEMS deformable mirrors based on electrostatic parallel plate actuator with different elastic coefficients are designed and fabricated by surface silicon process. The influence of elastic coefficient on the three performance parameters of deformable mirror, namely stroke, suction voltage and natural frequency, was analyzed by analytical formula and finite element simulation method, and the experiment was carried out by using white light surface profilometer. The experimental results show that the semicircular beam-driven deformable mirrors in the three deformable mirrors have a moderate suction voltage and a large stroke, which are most suitable for the application of adaptive optical systems.
【作者单位】：中国科学院光电技术研究所微细加工光学技术国家重点实验室;电子科技大学光电信息学院;中国科学院大学;
【基金】：国家自然科学基金项目(11403029;61071027) 国家自然科学基金委员会-中国工程物理研究院NSAF联合基金项目(11176033)
【分类号】：TH-39;TH74
【正文快照】： 0引言微机电系统(Micro-Electro-MechanicalSystems,MEMS)[1]变形镜是利用微电子工艺加工制作的微型可变形反射镜,是小型化自适应光学系统的关键器件之一,可广泛应用在天文望远镜及人眼视网膜成像等领域[2-4]。MEMS变形镜从结构上可分为镜面和驱动器两部分,镜面决定了变形镜的

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