大型光学设备检测中大口径平行光管波像差的消除

发布时间：2018-04-27 15:52

本文选题：光学检测 + 大型光学设备　；参考：《光学精密工程》2015年02期

【摘要】：使用大口径平行光管检测大型光学设备或元件时,平行光管的自身误差会影响检测结果,故本文提出了一种消除光学检测结果中平行光管引入误差的新方法。该方法使用干涉仪获取平行光管和光学检测系统的出射波前信息并以37项Standard Zernike Phase多项式进行拟合;通过两组系数相减分离平行光管引入误差,再配合ZEMAX中建立的等效被检光学系统的仿真模型模拟真实系统的出射光锥,最终获得被检光学系统真实的出射波前信息。利用ZEMAX中的光学系统模型验证了该方法在大口径光学检测工作中的可行性;使用焦距为1 597mm,口径为150mm的小型平行光管、焦距为50mm的光学镜头进行了实验。实验结果表明:使用该方法获得的被检光学系统出射波前与真实波前的PV值误差小于0.005λ,RMS值误差小于0.001λ,可以满足实验室中对被检光学系统成像质量参数检测的精度要求。
[Abstract]:When large optical devices or components are detected by using large diameter parallel optical tubes, the errors of parallel optical tubes will affect the detection results. Therefore, a new method to eliminate the errors introduced by parallel optical tubes in optical inspection results is proposed in this paper. In this method, the wavefront information of parallel optical tube and optical detection system is obtained by interferometer and fitted with 37 items of Standard Zernike Phase polynomials. With the simulation model of the equivalent detected optical system established in ZEMAX to simulate the output cone of the real system, the real wavefront information of the detected optical system is obtained. The feasibility of this method in large aperture optical detection is verified by using the optical system model in ZEMAX. The experiment is carried out using a small parallel optical tube with a focal length of 1 597 mm and a aperture of 150mm and an optical lens with a focal length of 50mm. The experimental results show that the PV value error of the detected optical system is less than 0.005 位 / L and 0.001 位, which can meet the precision requirements of the imaging quality parameters of the optical system tested in the laboratory. The experimental results show that the error of the PV value of the detected optical system is less than 0.005 位 / L and the error of the real wavefront is less than 0.001 位.
【作者单位】：中国科学院长春光学精密机械与物理研究所;中国科学院大学;
【基金】：国家自然科学基金资助项目(No.61307114)
【分类号】：TH74

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