复合微透镜阵列的制备及成像研究
发布时间：2019-02-16 21:14
【摘要】：随着光学技术的发展,微透镜及其阵列结构逐渐受到研究学者们的青睐,近些年来,微透镜及其阵列结构的制备方法也是层出不穷,比较成熟的制备方法有:激光刻蚀法、光刻法、热流法、电润湿法、电泳动法等。由于微透镜及其阵列结构不仅具有光学透镜的固有属性,而且具有微型化,便于集成化以及可调焦距等特点,广泛应用于各大领域。目前制备的微透镜阵列大多是单层微透镜结构,因此本文提出并制备了一复合微透镜阵列,对其光学性能进行了分析。本论文主要研究内容如下:采用水辅助飞秒激光直写技术在玻璃材料内部制备了一种锥形微透镜阵列。通过改进传统激光直写技术,采用水辅助飞秒激光直写技术实现了玻璃材料内部微结构的制备,并提高了制备效率。制备过程中,首先通过三维精密平台的精密控制在玻璃内部制备了结构尺寸大小以及分布情况可控的微柱形阵列结构。随后,对具有微柱形阵列进行热处理,在玻璃态转化温度下以及液体表面张力作用下,微腔内表面会变得光滑,同时微柱形结构会发生形变,转化成锥形阵列结构。最后,实验上对锥形微透镜阵列的光学性能进行了检测,实验结果证明锥形阵列结构具有较好的成像能力和分束能力。提出并制备了两种全新的具有双焦点成像特性的高分子聚合物复合微透镜阵列结构,特别是具有虚焦点成像能力和实焦点成像能力的平凹面高分子聚合物复合微透镜阵列。利用液滴法在涂有Teflon疏水材料的二氧化硅玻璃基板表面制备了多层高分子复合微透镜阵列,制备过程中,不同的固化方式,会形成凹凸和凸凸两种复合微透镜阵列。研究了聚合物的固化温度和固化时间对微透镜直径的影响。从理论和实验上对复合微透镜阵列进行建模分析和光学性能检测,实验结果显示复合微透镜阵列具有极好的二次成像本领和聚焦本领,理论结果与实验结果得到了极好的吻合。提出一种简单低成本制备嵌入式复合微透镜阵列结构的方法,此种方法制备出的复合微透镜阵列结构的焦距可以根据嵌入式微透镜结构的曲率半径大小控制选择。利用光学设计软件对提出的复合微透镜阵列结构进行了建模模拟,设定8组不同曲率半径的嵌入式微透镜结构,并进行光线追迹仿真。随后,利用液滴法在涂有Teflon疏水材料的二氧化硅玻璃基板表面制备了SU-8光刻胶平凸透镜阵列结构,通过图案转移法,SU-8液滴嵌入,聚二甲基硅氧烷(PDMS)封装制备了嵌入式复合微透镜结构。紧接着在实验上对复合微透镜阵列结构的光学性能进行了检测,结果证明复合微透镜阵列结构具有较好的成像能力和聚焦能力。
[Abstract]:With the development of optical technology, microlens and its array structure have gradually been favored by researchers. In recent years, the fabrication methods of microlens and its array structure have emerged in endlessly. The more mature preparation methods are: laser etching method. Photolithography, heat flux, electrowetting, electrophoretic motility, etc. Because the microlens and its array structure not only have the inherent properties of optical lens, but also have the characteristics of miniaturization, easy integration and adjustable focal length, they are widely used in various fields. At present, most of the microlens arrays are single-layer microlens structures, so a composite microlens array is proposed and fabricated, and its optical properties are analyzed. The main contents of this thesis are as follows: a conical microlens array was fabricated in glass by water assisted femtosecond laser direct writing. Water assisted femtosecond laser direct-writing technique was used to fabricate the microstructure of glass by improving the traditional laser direct-writing technology and improving the preparation efficiency. In the process of fabrication, the micro-cylindrical array structure with controllable size and distribution is fabricated in the glass interior by the precision control of the three-dimensional precision platform. After the heat treatment of the microcylindrical array, the inner surface of the microcavity will become smooth under the glass state transition temperature and the surface tension of liquid, and the microcylindrical structure will deform into a conical array structure. Finally, the optical properties of the tapered microlens array are tested experimentally. The experimental results show that the conical array structure has good imaging ability and beam splitting ability. Two novel polymer composite microlens arrays with dual focus imaging characteristics are proposed and fabricated, especially the flat concave polymer composite microlens arrays with virtual focus imaging ability and real focus imaging ability. A multilayer polymer composite microlens array was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. In the process of preparation, two kinds of composite microlens arrays, concave and convex, were formed by different curing methods. The effects of curing temperature and curing time on the diameter of microlens were studied. The model analysis and optical performance test of the composite microlens array are carried out theoretically and experimentally. The experimental results show that the composite microlens array has excellent secondary imaging ability and focusing ability, and the theoretical results are in good agreement with the experimental results. A simple and low cost method for fabricating embedded composite microlens arrays is proposed. The focal length of the composite microlens arrays can be controlled according to the curvature radius of the embedded microlens structures. The composite microlens array structure was modeled and simulated by using optical design software. Eight embedded microlens structures with different curvature radii were set up, and the ray tracing simulation was carried out. Then, the SU-8 photoresist flat convex lens array structure was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. By pattern transfer method, SU-8 droplet was embedded. The embedded composite microlens structure was fabricated by polydimethylsiloxane (PDMS) encapsulation. Then the optical properties of the composite microlens array structure are tested experimentally. The results show that the composite microlens array structure has good imaging ability and focusing ability.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH74
，
本文编号：2424838
[Abstract]:With the development of optical technology, microlens and its array structure have gradually been favored by researchers. In recent years, the fabrication methods of microlens and its array structure have emerged in endlessly. The more mature preparation methods are: laser etching method. Photolithography, heat flux, electrowetting, electrophoretic motility, etc. Because the microlens and its array structure not only have the inherent properties of optical lens, but also have the characteristics of miniaturization, easy integration and adjustable focal length, they are widely used in various fields. At present, most of the microlens arrays are single-layer microlens structures, so a composite microlens array is proposed and fabricated, and its optical properties are analyzed. The main contents of this thesis are as follows: a conical microlens array was fabricated in glass by water assisted femtosecond laser direct writing. Water assisted femtosecond laser direct-writing technique was used to fabricate the microstructure of glass by improving the traditional laser direct-writing technology and improving the preparation efficiency. In the process of fabrication, the micro-cylindrical array structure with controllable size and distribution is fabricated in the glass interior by the precision control of the three-dimensional precision platform. After the heat treatment of the microcylindrical array, the inner surface of the microcavity will become smooth under the glass state transition temperature and the surface tension of liquid, and the microcylindrical structure will deform into a conical array structure. Finally, the optical properties of the tapered microlens array are tested experimentally. The experimental results show that the conical array structure has good imaging ability and beam splitting ability. Two novel polymer composite microlens arrays with dual focus imaging characteristics are proposed and fabricated, especially the flat concave polymer composite microlens arrays with virtual focus imaging ability and real focus imaging ability. A multilayer polymer composite microlens array was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. In the process of preparation, two kinds of composite microlens arrays, concave and convex, were formed by different curing methods. The effects of curing temperature and curing time on the diameter of microlens were studied. The model analysis and optical performance test of the composite microlens array are carried out theoretically and experimentally. The experimental results show that the composite microlens array has excellent secondary imaging ability and focusing ability, and the theoretical results are in good agreement with the experimental results. A simple and low cost method for fabricating embedded composite microlens arrays is proposed. The focal length of the composite microlens arrays can be controlled according to the curvature radius of the embedded microlens structures. The composite microlens array structure was modeled and simulated by using optical design software. Eight embedded microlens structures with different curvature radii were set up, and the ray tracing simulation was carried out. Then, the SU-8 photoresist flat convex lens array structure was prepared on the surface of silica glass substrate coated with Teflon hydrophobic material by droplet method. By pattern transfer method, SU-8 droplet was embedded. The embedded composite microlens structure was fabricated by polydimethylsiloxane (PDMS) encapsulation. Then the optical properties of the composite microlens array structure are tested experimentally. The results show that the composite microlens array structure has good imaging ability and focusing ability.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TH74
，
本文编号：2424838
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