基于磁敏元件的寄生式时栅位移传感器研究

发布时间：2018-04-01 11:26

本文选题：寄生式时栅　切入点：磁敏元件　出处：《重庆理工大学》2017年硕士论文

【摘要】：时栅位移传感器属于高精度位移传感器,其通过对时间的测量完成空间测量进而测得位移量。寄生式时栅属于时栅位移传感器,其是为解决大、中、空、油污、噪声、震动等极端环境和特殊工况下的位移测量问题,但传统的寄生时栅位移传感器依靠人工绕线方式作为传感元件,它的传输效率相对较低、一致性较差、易被人为的因素干扰,并对寄生式时栅位移传感器的测量精度产生影响。磁敏元件作为一种电磁感应元件能跟随磁场的变化作为电信号输出,并且已经应用于一些测量领域,例如:磁读数头、地磁场检测等。且磁敏元件相对于绕制线圈具有小体积、灵敏度较高、抗干扰能力较强、功耗低等优点。基于以上原因,研究磁敏元件作为传感元件的寄生式时栅位移传感器。其主要研究工作如下:(1)分析磁敏元件的输入输出特性,结合时栅位移传感器的测量原理,理论推导出建立在磁敏元件基础上的寄生式时栅的测量原理。并通过对霍尔元件、AMR元件、GMR元件及其TMR元件的输入与输出的特性进行研究比较,对每一种磁敏元件做出实验验证。从理论和实验得出基于TMR元件的TMR芯片能够满足寄生式时栅的测量。(2)影响磁敏元件输出的因素主要有磁钢(大小、形状、材料)、磁钢与磁敏元件的间隙、磁敏元件与被测对象的气隙,通过电磁场仿真软件(ANSOFT Maxwell)分别对其相应的参数进行仿真分析。根据仿真分析的结果,确定传感器的结构参数。根据电磁场仿真及寄生式时栅测量原理设计两相空间正交的TMR芯片圆弧工装并确定安装芯片位置,完成传感器的结构设计。(3)根据寄生式时栅的测量原理与应用要求,采用集成度高、功能强大的STM32F407作为其控制芯片,并进行相应的硬件电路与程序软件设计。(4)根据测量原理搭建实验平台,采用更高精度的海德汉光栅对其进行精度检定实验,可知原始误差峰峰值为140″。从误差分析可知其主要由机械和电气误差组成,采用误差修正技术对其进行修正,误差峰峰值达到8″。综上所述,本文通过分析绕制线圈作为传感元件的优缺点,提出了基于磁敏元件代替绕制线圈的测量方法;给出了基于磁敏元件的寄生式时栅位移传感器的测量原理,设计了传感器结构,并研制出了传感器样机;实验表明,磁敏元件作为传感元件能够实现高精度位移测量。因此,本文的研究对于寄生式时栅位移传感器解决大、中、空等特殊条件下的位移测量提供了新的研究方向。
[Abstract]:Time grating displacement sensor is a kind of high precision displacement sensor, which can measure displacement by measuring time and space. The parasitic time grating is a time grating displacement sensor, which is designed to solve the problem of large, medium, empty, oil pollution, noise, etc. The displacement measurement problem in extreme environment such as vibration and special working conditions, but the traditional parasitic time-grid displacement sensor relies on manual winding as sensor element, its transmission efficiency is relatively low, the consistency is poor, and it is easily disturbed by artificial factors. As a kind of electromagnetic induction element, magnetic sensor can follow the change of magnetic field as electrical signal output, and it has been used in some measurement fields, such as magnetic reading head. The magnetic sensor has the advantages of small volume, high sensitivity, strong anti-interference ability, low power consumption and so on. In this paper, the parasitic time-grid displacement sensor of magnetic sensor is studied. The main research work is as follows: 1) the input and output characteristics of magnetic sensor are analyzed, and the measuring principle of time-grid displacement sensor is combined. The measurement principle of parasitic time grating based on magnetic sensing element is derived theoretically, and the characteristics of input and output of Hall element AMR element and its TMR element are studied and compared. From theory and experiment, it is concluded that TMR chip based on TMR element can satisfy the measurement of parasitic time grating. The main factors that affect the output of magnetic sensor are magnetic steel (size, shape, shape). The material, the gap between the magnetic steel and the magnetic sensor, the air gap between the magnetic sensor and the measured object, and the corresponding parameters are simulated and analyzed by the electromagnetic field simulation software, Ansover Maxwell. according to the results of the simulation analysis, According to the electromagnetic field simulation and parasitic time grid measurement principle, the circular arc tool of TMR chip with two phase space is designed and the position of the mounting chip is determined. According to the measurement principle and application requirements of parasitic time grating, a highly integrated and powerful STM32F407 is used as its control chip. And the corresponding hardware circuit and program software design. 4) according to the principle of measurement, build the experimental platform, and use a higher precision Hyderham grating to carry out the precision verification experiment. The original error peak value is 140 ". From the error analysis, we can see that it is mainly composed of mechanical and electrical errors. The error correction technique is used to correct it, and the peak error peak reaches 8". By analyzing the advantages and disadvantages of winding coil as sensing element, this paper puts forward a measurement method based on magnetic sensor instead of winding coil, gives the measuring principle of parasitic time grating displacement sensor based on magnetic sensor, and designs the sensor structure. The experimental results show that the magnetic sensor as a sensor can achieve high precision displacement measurement. Therefore, the research in this paper is very important for the parasitic time grating displacement sensor. Displacement measurement under special conditions such as space provides a new research direction.
【学位授予单位】：重庆理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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