光栅尺测量精度误差补偿系统研究

发布时间：2018-04-08 23:00

本文选题：直线光栅尺　切入点：误差补偿　出处：《组合机床与自动化加工技术》2017年12期

【摘要】：文章主要研究影响光栅尺测量精度的因素,探索提高测量精度的途径。通过研究影响光栅尺测量精度的因素分析了其静态误差模型;然后,通过设计可调的光栅尺误差检测平台并结合优化的测量方案对各个测量点进行了大量的误差检测,并分析了各个测量点测量误差的统计特性,再对检测结果进行正态分布检验,获得了较为准确真实的光栅尺测量误差曲线,验证了其静态误差模型;最终在光栅尺数显系统分别采用全程线性补偿及分段线性补偿方法对光栅尺测量误差进行修正。实验结果经第三方计量机构检测表明:经一次全程线性补偿后,在直线光栅尺90mm测量长度内,测量精度由0~19.42μm提高到-3.26~1.32μm,经二次分段线性补偿后,测量精度提高到-1.453~0.9332μm。
[Abstract]:This paper mainly studies the factors affecting the measurement accuracy of the grating, explore a way to improve the measurement accuracy. The static error model is analyzed by the study of factors affecting the measurement accuracy of the grating; then, grating error detection platform through the design of adjustable for each measurement point of error detection based measurement scheme optimization, and analysis of the statistical characteristics of each point of the measuring error, and then the test results were normal distribution test, the measurement error of grating curve is more accurate, validated the static error model; finally the grating digital display system uses the whole linear compensation and piecewise linear compensation method of measurement error correction grating by the third party. The experimental results show that the detection mechanism of measuring a full linear compensation, the linear grating 90mm measurement range, measurement accuracy by 0~1 9.42 mu m is raised to -3.26~1.32 m. After two piecewise linear compensation, the measurement accuracy is improved to -1.453~0.9332 mu m.

【作者单位】：广东工业大学广东省微纳加工技术与整备重点实验室;
【基金】：广东省科技计划(2013B011301005) 东莞市产学研项目(2013509109101) 国家自然科学基金(51305084)
【分类号】：TG806;TP212

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