基于PTFE基材的FAIMS传感器设计

发布时间：2018-06-22 09:12

本文选题：高场非对称波形离子迁移率谱 + 电晕放电　；参考：《传感技术学报》2017年11期

【摘要】：为降低FAIMS传感器制作的复杂度与成本,设计了一种基于PTFE基板的FAIMS传感器。该传感器由漂移管、离子源及外围电路组成。其中漂移管基于PTFE基板构建,使用PCB工艺制备Au电极,利用厚度为0.4 mm氧化铝条作为绝缘支撑片将上下电极隔离并形成通道,用于离子分离与检测,漂移管的总体积1.9 cm3。离子源通过针-网式电晕放电建立,通过软焊接工艺连接到FAIMS上基板。外围电路包括FAIMS工作所需的高频高压非对称电场及补偿电场产生电路和微弱离子电流放大电路。常温下,传感器响应恢复时间小于3 s。利用化学战剂模拟剂甲基膦酸二甲酯DMMP(Dimethyl Methylphosphonate)测试了传感器的灵敏度,实现了0.5μg/m3的量级DMMP样品的检测。
[Abstract]:In order to reduce the complexity and cost of fabrication of FAIMS sensor, a kind of FAIMS sensor based on PTFE substrate is designed. The sensor consists of drift tube, ion source and peripheral circuit. The drift tube was constructed based on PTFE substrate. Au electrode was fabricated by PCB process. The upper and lower electrodes were isolated and formed by using 0.4 mm aluminum oxide strip as insulation support. The drift tube was used for ion separation and detection. The total volume of drift tube was 1.9 cm 3. The ion source is established by needle-net corona discharge and is connected to the substrate of FAIMS by soft welding process. Peripheral circuits include high-frequency and high-voltage asymmetric electric field and compensation electric field generation circuit and weak ion current amplifier circuit for FAIMS operation. At room temperature, the response recovery time of the sensor is less than 3 s. The sensitivity of the sensor was measured by using Dimethyl methyl phosphonate (Dimethyl methyl phosphonate), a simulant of chemical warfare agent. The detection of DMMP samples of 0.5 渭 g/m3 was realized.
【作者单位】：北京物资学院信息学院;北京物资学院北京高校物流技术工程中心;
【基金】：北京高校物流技术工程研究中心项目(BJLE2010)
【分类号】：TP212

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