高精度光纤微压力传感器研究

发布时间：2018-08-06 12:37

【摘要】：目前在临床医学领域,亟待可以植入人体的新型高精度微压力传感器为临床诊断提供依据;在某些严酷的工业环境下也需要对工业生产中的压力进行高精度传感测量。本文创新性地提出了一种基于低反射长腔长法布里-珀罗(F-P)腔结构的光纤微压力传感器,同时结合球形压力封装结构,可以实现无接触角测量误差的高精度微压力传感。本文的主要内容有:1.推导了F-P腔多光束干涉理论模型,通过仿真分析了F-P腔的透射光谱与反射光谱特性,得到了低反射率时反射光谱具有较高的精细度,为低反射长腔长结构的提出奠定了理论基础。同时对F-P腔的几种腔长解调方法进行了仿真分析。2.提出了一种宽频带低反射长腔长F-P腔结构。通过仿真分析得到了不同腔长时的灵敏度曲线,验证了采用长腔长结构实现高精度微压力传感的可行性;依据胡可定律结合牛顿第二定律建立了传感头的频率响应模型,通过仿真分析得到了传感头的频率响应曲线,提出了采用腐蚀工艺通过削减压力敏感端的厚度以提高传感头的频率响应。3.提出了一种无接触角测量误差的球形压力封装结构。建立了球形封装结构的压力传导理论模型,通过仿真分析得到了封装结构的几何尺寸与传感头可以感知的空间角度以及压力传导特性之间的关系,验证了采用该封装结构实现无接触角测量误差的可行性。4.设计并搭建了微压力校准系统,开展了灵敏度以及准确度实验研究,实验结果表明:在10kPa~100kPa的微压力测试范围内,其相对误差最大不超过9.46%,测量精度为?7kPa;设计并搭建了基于相位生成载波(PGC)技术的动态特性测试系统,进行了动态特性测试,测试结果表明:通过削减压力敏感端的质量可以提高传感头的响应频率,实现了一定频带宽度内的动态压力响应。
[Abstract]:At present, in the field of clinical medicine, it is urgent to provide the basis for clinical diagnosis with a new type of high precision micro pressure sensor which can be implanted into human body, and it is also necessary to carry out high precision sensing measurement of pressure in industrial production under some harsh industrial environments. In this paper, an optical fiber micro pressure sensor based on the low reflectance long Fabry-Perot (F-P) cavity structure is proposed, and a high precision micro pressure sensor without contact angle measurement error can be realized by combining the spherical pressure package structure. The main content of this paper is: 1. The theoretical model of multi-beam interference in F-P cavity is derived. The characteristics of transmission spectrum and reflection spectrum of F-P cavity are analyzed by simulation. It is shown that the reflection spectrum has a high precision when the reflectivity is low. It lays a theoretical foundation for the long structure of low reflection cavity. At the same time, several kinds of cavity length demodulation methods of F-P cavity are simulated and analyzed. A wide band low reflection long cavity long F-P cavity structure is proposed. The sensitivity curves of different cavity lengths are obtained by simulation analysis, and the feasibility of using long cavity length structure to realize high precision micro-pressure sensing is verified, and the frequency response model of sensor head is established based on Hook's law and Newton's second law. The frequency response curve of the sensor head is obtained by simulation analysis. The corrosion process is proposed to improve the frequency response of the sensor head by reducing the thickness of the pressure sensitive end. A spherical pressure packaging structure without contact angle measurement error is proposed. The pressure conduction theory model of spherical packaging structure is established. The relationship between the geometric dimension of the package structure and the sensing angle and the pressure conduction characteristics of the sensor head is obtained by simulation analysis. The feasibility of using the package structure to realize non-contact angle measurement error is verified. 4. 4. The micropressure calibration system is designed and built, and the sensitivity and accuracy of the system are studied. The experimental results show that: within the range of 10kPa~100kPa micro-pressure measurement, The relative error is not more than 9.46 and the measurement precision is 7 KPA. The dynamic characteristic testing system based on phase generated carrier (PGC) technology is designed and built. The test results show that the response frequency of the sensor can be increased by reducing the quality of the pressure sensitive end, and the dynamic pressure response within a certain bandwidth can be realized.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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