氯硅烷残液水解制备二氧化硅团聚的机理研究

发布时间：2019-07-22 13:12

【摘要】：多晶硅生成工艺中的副产物氯硅烷残液,具有腐蚀性强、产量大等特点。采用多晶硅副产物氯硅烷残液为原料进行水解反应生成二氧化硅。研究了以不同水解方式在不同水解体系中引入位阻剂及该位阻剂的时效性对二氧化硅团聚的影响以及机理研究。结果表明:气-液反应的水解方式产出的二氧化硅呈现颗粒状具有颗粒特性;水解体系中引入位阻剂后产物二氧化硅分散性好,颗粒均匀、粒径大小在2μm左右;并且证实了位阻剂的位阻作用具有时效性。
[Abstract]:The by-product chlorosilane residual liquid in polysilicon formation process has the characteristics of strong corrosion and large output. The polysilicon by-product chlorosilane residue was used as raw material for hydrolysis to form silica. The effect of introducing potential inhibitor and its timeliness on silica agglomeration in different hydrolysis systems by different hydrolysis methods and its mechanism were studied. The results show that the silica produced by the hydrolysis method of gas-liquid reaction has the characteristics of particles, and the product silica has good dispersion, uniform particle size and particle size of about 2 渭 m when the potential resistance agent is introduced into the hydrolysis system, and it is confirmed that the steric hindrance of steric resistance agent has timeliness.
【作者单位】：昆明理工大学环境科学与工程学院;
【基金】：国家自然科学基金(41261079)
【分类号】：X78

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