硅探测器结构中激光超声及粘接缺陷检测研究

发布时间：2018-01-15 06:26

本文关键词：硅探测器结构中激光超声及粘接缺陷检测研究　出处：《南京理工大学》2017年硕士论文　论文类型：学位论文

【摘要】：本文针对硅探测器结构中激光超声及其粘接缺陷检测进行了研究。首先,从理论和实验两方面,介绍了粘接类型结构的研究背景。从对其缺陷进行检测的激光超声入手,基于激光超声的激发机理,建立了硅探测器结构中激光激发超声及其与缺陷相互作用的物理模型,所选模型结构上具有超薄表层特点,根据变分原理,进而建立相应的有限元模型,编制相对应算法;在此基础上,理论模拟了硅探测器结构中激光超声的激发、传播过程,主要考虑激发中心点和对心点,以及上表面距离激发中心点不同位置的接收点,给出这些位置处一定时间范围内的垂直表面位移波形。对这类模型中粘接缺陷的检测方法进行了理论上的探索。其次,针对斐索干涉仪的结构功能特性,进行了理论分析;在此基础上,研究适用于激光超声检测的光纤斐索干涉仪并完成其制作。最后,搭建激光超声实验装置,完成该型干涉仪接收振动波形测试,测量铝材声表面波的振幅及声速,利用制作的光纤斐索干涉仪对理想粘接条件下激光激发硅探测器的对心超声波形进行了探测。
[Abstract]:In this paper, the detection of laser ultrasonic and its bonding defects in silicon detector structure is studied. Firstly, the theoretical and experimental aspects are discussed. This paper introduces the research background of bonding type structure, starting with laser ultrasonic which detects its defects, and based on the excitation mechanism of laser ultrasonic. The physical model of laser excited ultrasound and its interaction with defects in the structure of silicon detector is established. The selected model has the characteristics of ultra-thin surface layer. According to the variational principle, the corresponding finite element model is established. Compiling corresponding algorithm; On this basis, the laser ultrasonic excitation and propagation process in the structure of silicon detector are simulated theoretically, mainly considering the excitation center point and the center point, as well as the receiving points at different positions from the upper surface to the excitation center point. The vertical surface displacement waveforms at these positions in a certain time range are given, and the detection methods of bonding defects in these models are explored theoretically. Secondly, the structural and functional characteristics of the Fisso interferometer are analyzed. Theoretical analysis is carried out; On this basis, the fiber-optic Fessel interferometer suitable for laser ultrasonic detection is studied and fabricated. Finally, a laser ultrasonic experimental device is built to test the vibration waveform of this type of interferometer. The amplitude and velocity of surface acoustic wave of aluminum were measured. The ultrasonic shape of laser excited silicon detector was detected by using the fiber-optic Fieso interferometer.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN249

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