大气压脉冲辉光放电辅助脉冲调制射频辉光放电

发布时间：2018-03-30 10:23

本文选题：大气压脉冲辉光放电　切入点：脉冲调制射频辉光放电　出处：《东华大学》2017年硕士论文

【摘要】：大气压辉光放电近年来一直是等离子体研究热点之一。在之前的研究中,对大气压辉光放电的几种重要的形式即大气压脉冲辉光放电,大气压介质阻挡辉光放电以及大气压射频辉光放电等都做了大量的研究,这些放电形式都有着各自的特点,而脉冲调制射频辉光放电实现了放电强度和放电稳定性的有效调控,但也表现出新的问题,即放电的维持电压偏高,起辉不易等问题。本论文将在脉冲调制射频辉光放电中射频放电段之间引入脉冲放电,通过改变大气压脉冲放电与射频放电段之间的时间间隔和脉冲放电强度,研究脉冲放电对射频放电段起辉阶段的影响。首先,通过比较大气压脉冲调制射频辉光放电中引入脉冲放电后,与单纯的脉冲调制射频辉光放电的射频放电段的起辉阶段的电学特性和光学特性后,发现引入脉冲放电后射频放电段的起辉时间变短,且起辉电压和维持电压也相应降低。然后,分别通过改变脉冲放电与射频放电段时间间隔和脉冲放电放电强度来探究这两个因素对射频放电段的规律性影响。在脉冲放电强度不变的条件下的脉冲放电与射频放电段时间间隔为2μs,5μs和8μs这三种情况,以及在脉冲放电与射频放电段时间间隔维持在5μs时,脉冲放电电流强度峰峰值为0.86A,1.22A和2.24A的三种情况下分别进行具体研究,通过研究发现,在脉冲放电强度的电流峰峰值为1.22A的情况下,随着时间间隔的减小,射频放电的起辉时间也在逐渐减少,最多可以减少0.8μs;而在脉冲放电与射频放电段时间间隔为5μs不变的情况下,随着脉冲放电电流强度的增加(电流强度峰峰值的大小不超过2.24A),射频放电段的起辉时间减少,起辉电压及维持电压也相对减小,但当脉冲放电电流峰峰值达到2.24A以后,发现射频放电段起辉时间反而变长。
[Abstract]:Atmospheric pressure glow discharge has been one of the hotspots of plasma research in recent years. In previous studies, atmospheric pressure pulse glow discharge is one of the most important forms of atmospheric pressure glow discharge. Atmospheric dielectric barrier glow discharge and atmospheric pressure radio frequency glow discharge have done a lot of research. These discharge forms have their own characteristics, and pulse modulation radio frequency glow discharge can effectively regulate the discharge intensity and discharge stability. But there are some new problems, such as the high voltage of maintaining the discharge, the difficulty of starting the discharge, etc. In this paper, the pulse discharge will be introduced between the RF discharge segments of the pulse modulated RF glow discharge, and the pulse discharge will be introduced into the pulse modulation radio-frequency glow discharge. By changing the time interval between atmospheric pressure pulse discharge and radio frequency discharge section and the pulse discharge intensity, the influence of pulse discharge on the initiation stage of radio frequency discharge section is studied. By comparing the electrical and optical characteristics of the radiofrequency discharge with pulse modulation at atmospheric pressure at the beginning stage of the radiofrequency discharge, the pulse discharge is introduced into the radio-frequency glow discharge and the radio-frequency discharge segment of the radio-frequency glow discharge with the simple pulse modulation is compared. It is found that the initiation time of RF discharge becomes shorter and the starting voltage and maintenance voltage decrease accordingly after the pulse discharge is introduced. The effects of these two factors on the regularity of RF discharge were investigated by changing the time interval between pulse discharge and radio frequency discharge and the intensity of pulse discharge. Pulse discharge and emitter under the condition of constant pulse discharge intensity. The frequency discharge interval is 2 渭 s 5 渭 s and 8 渭 s. When the time interval between pulse discharge and radio frequency discharge is maintained at 5 渭 s, the peak value of pulse discharge current intensity is 0.86An 1.22A and 2.24A, respectively. When the peak current peak of pulse discharge intensity is 1.22A, with the decrease of time interval, the starting time of RF discharge decreases gradually. When the time interval between pulse discharge and radio frequency discharge is 5 渭 s, the starting time of RF discharge decreases with the increase of pulse discharge current intensity (the peak value of current intensity is not more than 2.24Ag). However, when the peak value of pulse discharge current reaches 2.24A, it is found that the starting time of RF discharge section becomes longer.
【学位授予单位】：东华大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：O53;O461.21

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