基于共测量轨迹的快速外差激光干涉仪动态校准关键技术

发布时间：2018-08-20 20:10

【摘要】：外差激光干涉仪是超精密工程与纳米科技等领域中重要的位移检测手段,外差激光干涉仪动态位移测量的校准是保证其动态位移测量精度、实现其溯源性和标准化的必要技术手段。随着外差激光干涉仪动态位移测量精度和测量速度的不断提高,迫切需要高精度、快速的外差激光干涉仪动态位移测量校准方法和技术。校准中余弦、阿贝和空气折射率差异误差,以及关键动态性能指标——数据延迟误差如何校准,已成为实现外差激光干涉仪高精度、快速动态位移测量校准的瓶颈问题。本文为解决校准中的余弦、阿贝、空气折射率差异误差和数据延迟误差如何校准问题,提出了一种基于共测量轨迹的外差激光干涉仪动态位移测量校准方法,以及基于该共测量轨迹校准的数据延迟误差校准方法。具体研究内容如下:1、针对校准中的阿贝和空气折射率差异误差问题,提出了一种基于共测量轨迹的外差激光干涉仪动态位移测量校准方法。设计了共测量轨迹校准的标准干涉仪结构,使被校准干涉仪位移测量轴夹持在标准干涉仪四束平行测量光中间位置,实现相同位移测量方向、共测量轴和共测量点的干涉仪位移测量校准,在推导该标准干涉仪位移测量模型的基础上,建立了该共测量轨迹校准方法的位移校准模型和空气折射率差异误差模型,通过分析所建立的模型,证明该校准方法能够有效抑制校准中的阿贝和空气折射率差异误差。分析表明,10m位移范围内,阿贝误差小于2nm,空气折射率差异误差小于1nm。2、针对校准中的余弦误差问题,提出了一种基于光束方向向量的光轴平行性调节方法。设计了光束方向向量检测的双光斑位置探测单元和光束方向向量调节的双光楔镜组装置,建立了相应的光束方向向量测量模型和光束方向向量调节模型,在获得光束方向向量的基础上,可无耦合地两维旋转调节光束方向至目标方向,实现了光轴平行性的精密调节,在抑制校准中余弦误差的同时,还为校准中阿贝和空气折射率差异误差的抑制提供了技术保证。分析表明,该方法能够实现2"的光轴平行性调节,可使10m位移范围内余弦误差小于0.1nm。3、针对如何实现数据延迟误差校准问题,提出了基于共测量轨迹校准的数据延迟误差校准方法。通过分析干涉仪位移测量的数据延迟误差模型,提出并研究了数据延迟误差的校准模型,按照该模型原理,利用加速过程中瞬时校准结果的差值变化,在共测量轨迹校准前提下,实现了干涉仪测量分辨力量级的数据延迟误差校准,为今后干涉仪数据延迟误差校准的深入研究提供了必要的铺垫。实验结果表明,数据延迟误差的校准精度优于3nm,数据延迟时间的校准精度优于5ns。在上述研究的基础上,搭建基于共测量轨迹的外差激光干涉仪动态位移测量校准系统。对光轴平行性调节方法进行了实验验证,实验结果表明,光束方向的检测精度为1",调节精度为2",满足光轴平行性2"的调节要求。对所建立的空气折射率差异误差和位移校准模型进行了实验验证,证明了该共测量轨迹校准方法能够有效抑制校准中的空气折射率差异误差、阿贝和余弦误差。实验结果表明,10m位移范围内,空气折射率差异误差的模型值相对于实验值有13%的偏差,由此偏差关系可得,实际空气折射率差异误差小于1.2nm;阿贝和余弦误差各自模型值相对于实验值的偏差均为被校准干涉仪波长稳定度2×10-9;该共测量轨迹位移测量校准方法的校准重复性优于20nm。
[Abstract]:Heterodyne laser interferometer is an important displacement measurement method in the fields of ultra-precision engineering and nanotechnology. The calibration of dynamic displacement measurement of heterodyne laser interferometer is a necessary technical means to ensure its dynamic displacement measurement accuracy and realize its traceability and standardization. With the development of heterodyne laser interferometer, there is an urgent need for high precision and fast dynamic displacement measurement and calibration methods and techniques. In order to solve the calibration problems of cosine, Abbe, air refractive index difference error and data delay error in calibration, a method of dynamic displacement measurement and calibration of heterodyne laser interferometer based on common measurement trajectory is proposed in this paper. The method of data delay error calibration based on common measurement trajectory is also presented. The main research contents are as follows: 1. Aiming at the problem of Abbe and air refractive index difference error in calibration, a method of dynamic displacement measurement and calibration of heterodyne laser interferometer based on common measuring trajectory is proposed. Based on the displacement measurement model of the standard interferometer, the displacement calibration model of the common measurement trajectory calibration method and the error model of the air refractive index difference are established. The model is established by analysis. The results show that Abbe error is less than 2 nm and air refractive index difference error is less than 1 nm.2 in the range of 10 m displacement. A dual-spot position detection unit for beam direction vector detection and a double-wedge mirror assembly with beam direction vector adjustment are set up. The corresponding beam direction vector measurement model and beam direction vector adjustment model are established. On the basis of obtaining beam direction vector, the beam direction can be adjusted to the target direction by two-dimensional rotation without coupling. The precise adjustment of optical axis parallelism can not only suppress the cosine error in calibration, but also provide a technical guarantee to suppress the difference of refractive index between Abbe and air in calibration. The analysis shows that this method can realize 2 "optical axis parallelism adjustment, and make the cosine error less than 0.1 nm.3 in the range of 10 m displacement. In this paper, a method of data delay error calibration based on common measurement trajectory calibration is proposed. By analyzing the data delay error model of interferometer displacement measurement, a calibration model of data delay error is proposed and studied. According to the principle of the model, the difference of instantaneous calibration results during acceleration is used to calibrate the common measurement trajectory. On the premise of calibration, the data delay error calibration of the resolution level of the interferometer is realized, which provides a necessary foundation for the further study of the data delay error calibration of the interferometer. The experimental results show that the calibration accuracy of the data delay error is better than 3 nm, and the calibration accuracy of the data delay time is better than 5 ns. A dynamic displacement measurement and calibration system of heterodyne laser interferometer based on common measuring trajectory is established. The method of adjusting the optical axis parallelism is experimentally verified. The experimental results show that the detection accuracy of the beam direction is 1 ", the adjusting accuracy is 2" and the adjustment requirement of the optical axis parallelism is satisfied. The model is validated by experiments, which proves that the method can effectively suppress the air refractive index difference error, Abbe and cosine error in calibration. The experimental results show that the model value of air refractive index difference error is 13% deviated from the experimental value in the range of 10 m displacement, and the deviation relation can be obtained. The error of emissivity difference is less than 1.2 nm; the deviations of Abbe and cosine errors from the experimental values are 2 *10-9 for the wavelength stability of the calibrated interferometer; the calibration repeatability of the proposed method is better than 20 nm.
【学位授予单位】：哈尔滨工业大学
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TH744.3

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