金属微纳结构及其柔性光子、电子器件研究

发布时间：2018-01-12 13:20

本文关键词：金属微纳结构及其柔性光子、电子器件研究　出处：《东南大学》2016年博士论文　论文类型：学位论文

【摘要】：微纳结构作为微纳光子、电子器件的基础组成部分,是目前微纳米技术中的前沿和热点。通过将各种性能迥异的材料在微纳米的跨尺度范围内组合,能够形成具有多层次,多维度的微纳功能结构。这些结构特有的微观形态和材料具有的微观性能一起赋予了微纳结构独特的光学、电学特性。其中,光与金属微纳结构相互作用可产生表面等离激元,能够实现新概念的光传输、光局域和光加热。同时,金属微纳结构在纳米尺度表现出独特的小尺寸效应:其熔点及烧结温度均显著降低,可在接近室温的温度下形成良好的电连接;具有良好的柔韧性,为实现新型柔性光子、电子功能器件提供新途径。这些新颖特性使得金属微纳结构及其柔性器件的研究具有重要的科学意义和应用价值。本论文的研究目的在于探索金属微纳结构中包含的表面等离极化激元传输特性、局域表面等离激元光热效应、小尺寸效应等新特性和新效应。同时,利用上述新颖效应调控金属微纳结构自身形貌及光、电学特性,探索新型金属微纳结构的制备方法,进而实现基于新概念、新结构、新工艺的光子、电子柔性功能器件。本论文首先介绍了金属微纳结构的基本效应,概述了微纳结构在制备技术和柔性集成技术等方面的发展情况。然后着重介绍了论文在金属微纳结构光学、电学、机械性能的变化规律、调控机理等方面的理论和实验研究工作,同时介绍了在金属微纳结构的柔性集成方法以及柔性光子、电子器件应用等方面的探索研究工作。具体研究工作包括以下几个方面:(1)首先研究了表面等离激元的基本原理,包括可传输的表面等离极化激元和局域表面等离激元两部分。基于表面等离极化激元的传输特性提出了具有不对称包层折射率的楔形金属纳米波导结构,发现楔形两侧不对称折射率的引入可减小模式尺寸,增加传播距离。基于局域表面等离激元及其光热效应,探索了银纳米球及银纳米板结构的近场耦合作用。其中,基于银纳米板的结构相比银纳米球具有更显著的近场增强及光热效应,可形成高度局域的可调谐纳米热源。上述研究为后续章节提供了理论基础。(2)提出了两种柔性光传输结构,即基于聚合物多层复合衬底的柔性光波导结构,以及基于超薄金属薄膜及聚合物波导的混合表面等离激元结构。提出了聚合物多层复合衬底柔性光波导结构,研究了聚合物多层复合衬底的光学、机械特性,实现了加速度传感器灵敏度的调节。在此基础上将超薄金属薄膜引入柔性光波导结构,发现了表面等离极化激元的单偏振特性可抑制聚合物矩形波导结构中面外弯曲损耗,并可保持良好的单偏振特性,实现了能够在小弯曲半径下工作的柔性波导偏振器。上述研究为实现高性能的柔性光子器件提供了理论与实验基础。(3)针对低维金属纳米结构的局域表面等离激元共振、光热效应和小尺寸效应展开研究,并应用于柔性电子器件。研究了这些新颖效应对纳米结构的组成、形貌、电学、机械等特性的影响,揭示了其内在的物理机制。发现银纳米板层叠结构可成倍提高电子封装的剪切强度。发现银纳米板层叠结构具有各向异性电导率特性。对将"熔点降低"效应与表面等离激元光热效应结合的纳米尺度局域烧结展开研究,并提出一种基于针管直写-光热烧结的柔性电子器件制备方法,可在表面特性复杂的纸质衬底上制备具有优良弯曲特性的柔性电极。在此基础上提出并展示了具有优异弯折特性的新概念纸基触摸传感器,并建立了触摸传感的理论模型。(4)针对二维金属/石墨烯纳米复合结构的原位光还原制备技术及其在纸基柔性超级电容方面的应用开展研究。提出了利用激光直写技术将二维金纳米结构薄膜引入还原氧化石墨烯(rGO)薄膜,实现具有rGO/Au二维复合结构的原位光还原制备。系统研究了氧化石墨烯/氯酸金(GO/HAuCl4)的光还原过程,包括rGO/Au纳米复合结构的形貌、组成等特性,揭示了氯酸金与GO光还原的内在机制。发现了 rGO/Au二维复合结构具有极高的电导率,并论证了 rGO/Au微纳薄膜高电导率形成的内在机理;发现了飞秒激光还原可形成的多孔rGO。利用rGO/Au纳米薄膜结构的高电导率特性,实现了具有低等效串联电阻、高倍率性能、高频率响应的柔性共面微型超级电容。提出了基于多层结构的柔性共面微型超级电容,实现了微型超级电容面电容的倍增。
[Abstract]:The micro nano structure as micro nano photonic devices, electronic components, micro nanotechnology is currently in the forefront and hot. Through the combination of various properties of different materials in micro nano scale in the cross, to form a multi-level, multi dimension function of micro nano structure. With these unique properties of micro structure the micro morphology and the material together gives the micro nano optical structure, unique electrical properties. Among them, light and metal micro nano structure interaction can produce surface plasmons, optical transmission can realize the new concept of light and light, local heating. At the same time, the metal micro nano structure on the nanometer scale showed a small size effect unique: the melting point and the sintering temperature decreased significantly, can form a good electrical connection at near room temperature; has good flexibility, in order to realize the new flexible photon electronic devices to provide a new way. Study on these novel features make the metal micro nano structure and flexible device has important scientific significance and application value. The purpose of this study is to explore the metal micro nano structure contains the surface plasmon polarization transmission characteristics, localized surface plasmon photothermal effect, small size effect, new features and new effects. At the same time, the new regulation effect of metal micro nano structure morphology and optical, electrical properties, exploring a new type of metal micro nano structure preparation method, and based on the new concept, new structure, new photonic technology, flexible electronic functional devices. This paper firstly introduces the basic effect of metal micro nano structure, overview the development of micro nano structure preparation technology and flexible integration technology etc. in the system. Then introduced the metal micro nano structure of optical, electrical and mechanical properties change rule, regulation mechanism Theoretical and experimental research work and other aspects, and introduces the flexible integration method in metal micro nano structure and flexible photonic, study on electronic device applications. The specific work includes the following aspects: (1) firstly studies the basic principle of surface plasmon polaritons, including transmission surface etc. from the polariton and localized surface plasmon two. Surface plasmon polariton propagation is presented with asymmetric refractive index of the cladding of metal nano wedge waveguide structure based on introducing the wedge asymmetry index model can reduce the size and increase of the propagation distance. The localized surface plasmon and photothermal based on the effect, explore the near-field coupling effects of silver nanospheres and nano silver plate structure. The structure of silver nano plate based on silver nanospheres compared with near field photothermal enhancement and more significant Effect, can form a highly localized tunable nano heat source. The study provides a theoretical basis for the following parts. (2) proposed two kinds of flexible optical transmission structure, namely a flexible optical waveguide structure based on multilayer polymer composite substrate, and based on the ultra-thin metal film and polymer waveguide hybrid plasmonic structure is proposed. The polymer multilayer composite substrate flexible optical waveguide structure of optical polymer multilayer composite substrate, mechanical properties, the adjustment of the sensitivity of the sensor. On the basis of ultra-thin metal film using the flexible optical waveguide structure, surface plasmon polariton single polarization element can inhibit the polymer in a rectangular waveguide structure out of plane bending loss found, and can keep the good characteristics of the single polarization, realize flexible waveguide polarizer can work in small bending radius. The research for the realization of high To provide a theoretical and experimental foundation for flexible photonic device performance. (3) for the low dimensional metal nanoparticles localized surface plasmon resonance, study the photothermal effect and small size effect, and applied to a flexible electronic device. Research on these novel effects of nano structure composition, morphology, electrical and mechanical effects other characteristics, reveals its inherent physical mechanism. Silver nano plate laminated structure can improve the shear strength of electronic packaging. Double silver nano laminated structure is found in anisotropic conductivity. The "lower melting point" of nano scale local sintering effect and surface plasmon with photothermal effect, and a needle direct writing - flexible electronic device for thermal sintering preparation method, in the paper the substrate surface characteristics of complex on the flexible electrode preparation has excellent bending properties. On the basis of Propose and demonstrate a new concept paper base has excellent bending properties of the touch sensor, and established the theoretical model of touch sensing. (4) for the two-dimensional metal / graphene nano composite structure in situ photoreduction application of preparation technology and on paper based flexible super capacitor is studied. The proposed direct writing technology two dimensional gold nanostructure film using reduced graphene oxide (rGO) thin film by laser, in situ with rGO/Au two-dimensional composites prepared by photoreduction. Study on graphene oxide / chlorate gold (GO/HAuCl4) light reduction process, the morphology of rGO/Au nano composite package structure, composition and other characteristics, reveals the chlorate gold GO and the intrinsic mechanism of light reduction. It is found that the two-dimensional rGO/Au composite structure has high conductivity, the intrinsic mechanism of the rGO/Au micro nano thin film with high conductivity formation and demonstration; the femtosecond laser could be also found RGO. with high conductivity of porous rGO/Au nanometer thin film structure is formed, can achieve a low equivalent series resistance, high rate performance, high frequency response of the flexible micro coplanar super capacitor is proposed. The multilayer structure of flexible micro coplanar super capacitor based on the double micro super capacitor capacitor.

【学位授予单位】：东南大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN25;TP212;TM53

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