基于傅里叶光学原理的光栅衍射效率检测方法研究

发布时间：2018-04-18 08:38

本文选题：光栅衍射效率 + 傅里叶光学　；参考：《中国科学院研究生院(长春光学精密机械与物理研究所)》2016年博士论文

【摘要】：作为衍射光栅最为重要的特性之一,光栅的衍射效率直接决定了光谱仪器的能量传输特性;其检测的结果能够指导衍射光栅的制作以及刻划机的精度分析工作。因此,高精度光栅衍射效率测量设备的研究和开发工作对于光栅的制作者和使用者都具有重要价值。目前普遍采用双单色仪结构测量光栅的衍射效率,然而传统双单色仪结构测量光栅衍射效率方法中存在两个问题:一是测量标准反射镜、待测衍射光栅出射光谱带宽不同、光栅叠级、杂散光影响光栅衍射效率的准确性;二是单次测量仅针对单波长的测量模式影响光栅检测的效率。因此,本文提出了一种基于傅里叶光学原理的光栅衍射效率检测方法。针对该方法进行了较为深入的研究,其主要研究工作如下:第一,结合传统光栅衍射效率测试原理与傅里叶光学原理,提出了一种基于傅里叶光学原理的光栅衍射效率检测方法,推导并建立了该方法检测光栅衍射效率的数学模型,采用相关软件完成该方法的仿真验证,并对比传统双单色仪测量方法讨论该方法检测光栅衍射效率的测试条件及测试优势;第二,针对傅里叶变换型光栅衍射效率检测方法可能影响最终测量结果的因素:动镜平移误差、动镜倾斜误差、运动距离误差、系统像差及采样误差,结合傅里叶光学原理与光学追迹理论进行仿真分析,得出上述因素对最终衍射效率检测结果的影响,从而为仪器的设计提供理论指导;第三,根据提出的傅里叶变换型光栅衍射效率检测方法完成傅里叶变换型光栅衍射效率检测仪的实际设计:通过分析光源稳定性对测量结果的影响完成光源系统的选材与设计;通过分析入孔尺寸、光学元件面型、角锥棱镜垂直度等因素对仪器的影响完成前置干涉系统的选材与设计;利用传统的消像差设计方法完成测量单色仪的设计;第四,采用光斑对准及观察干涉图样的方法对已设计的傅里叶变换型光栅衍射效率检测仪进行装调,并结合实际测量需要完成傅里叶变换型光栅衍射效率检测仪的测控系统设计及数据处理开发工作;第五,通过傅里叶变换型光栅衍射效率检测仪实验完善仪器的装调及测控系统设计,为提高仪器的性能提出增加辅助探测器的改进方案,对比分析原方案和改进方案并完成对比实验,最后就改进后的傅里叶变换型光栅衍射效率检测仪相关性能进行实验验证。实验结果表明基于傅里叶光学原理的光栅衍射效率检测方法及其仪器整体的设计、装调、定标等均正确有效。
[Abstract]:As one of the most important characteristics of the diffraction grating, the diffraction efficiency of the grating directly determines the energy transfer characteristics of the spectrometer, and the detection results can guide the fabrication of the diffraction grating and the precision analysis of the engraving machine.Therefore, the research and development of high precision grating diffraction efficiency measurement equipment is of great value to the producers and users of grating.At present, double monochromator is widely used to measure the diffraction efficiency of grating. However, there are two problems in the traditional method of measuring diffraction efficiency of grating with double monochromator: one is measuring standard reflector, the bandwidth of outgoing spectrum of diffraction grating to be measured is different.The accuracy of grating diffraction efficiency is affected by raster stacking and stray light, and the efficiency of grating detection is affected by single measurement only for single wavelength measurement mode.Therefore, a grating diffraction efficiency detection method based on Fourier optics is proposed in this paper.The main research work is as follows: first, combining with the traditional diffraction efficiency measurement principle and Fourier optics principle,A grating diffraction efficiency detection method based on Fourier optics is proposed. A mathematical model for grating diffraction efficiency detection is derived and established.Compared with the traditional double Monochromator measurement method, the test conditions and advantages of this method for measuring grating diffraction efficiency are discussed.In view of the factors which may affect the final measurement results, such as the moving mirror translation error, the moving mirror tilt error, the moving distance error, the system aberration and the sampling error, the diffraction efficiency detection method of Fourier transform grating may affect the final measurement result.Combining the Fourier optics principle with the optical tracing theory to carry on the simulation analysis, obtains the above factors to the final diffraction efficiency detection result influence, thus provides the theory instruction for the instrument design; third,According to the Fourier transform grating diffraction efficiency testing method, the practical design of the Fourier transform grating diffraction efficiency detector is completed: the material selection and design of the light source system are completed by analyzing the influence of the light source stability on the measurement results;The material selection and design of the pre-interference system are completed by analyzing the influence of the size of the hole, the surface of optical element and the perpendicularity of the angle cone prism. The traditional aberration design method is used to complete the design of the measuring Monochromator.The method of spot alignment and interference pattern observation is used to adjust the designed Fourier transform grating diffraction efficiency detector.The measurement and control system design and data processing development of the Fourier transform grating diffraction efficiency detector are completed in combination with the actual measurement.Through the experiment of Fourier transform grating diffraction efficiency detector, the design of instrument installation and measurement and control system is perfected. In order to improve the performance of the instrument, an improved scheme of adding auxiliary detector is put forward. The original scheme and the improved scheme are compared and analyzed, and the contrast experiment is completed.Finally, the related performance of the improved Fourier transform grating diffraction efficiency detector is verified experimentally.The experimental results show that the grating diffraction efficiency detection method based on Fourier optics principle and the design, adjustment and calibration of the instrument are all correct and effective.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2016
【分类号】：O436.1

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