光学自由曲面子孔径拼接干涉检测技术

发布时间：2018-07-08 17:39

本文选题：自由曲面子孔径拼接干涉检测 + 非常规子孔径　；参考：《浙江大学》2016年博士论文

【摘要】：光学自由曲面因其表面自由度较大,可以针对性地提供或矫正不同的轴上或轴外像差,同时满足现代光学系统高性能,轻量化和微型化的要求,从而逐渐开始成为现代光学工程领域的新宠。虽然在设计,加工,检测等方面稳步发展,然而成像领域对于光学元件面形的高精度要求却限制了自由曲面的大规模应用。尤其,自由曲面的检测技术已经成为制约其应用的最重要因素。干涉测量法作为目前精度最高的检测手段之一,已经在光学平面,球面乃至非球面的检测领域得到了一致公认。借助于专门设计的补偿器,可以实现高精度的零位干涉检测,但是零位补偿器的设计、检测和装调都会引入误差。而对于那些非规则、非旋转对称的光学自由曲面,必须使用专门的CGH进行补偿。而CGH元件加工成本高,难度大,且难于调整等特性使其测量范围和测量精度均受到限制。因此,人们将目光转向了子孔径拼接技术,虽然子孔径拼接检测技术在大口径球面和中度非球面的检测中呈现出高检测精度的特点,但在非旋转对称的自由曲面检测中的应用依然没有实质性的突破。本文提出了一套自由曲面子孔径拼接干涉检测(Free form surface subaperture stitching interferometry, FSSI)技术与系统,将子孔径拼接干涉检测技术成功运用于自由曲面检测。主要研究内容包括：研究了FSSI系统方案与仿真方法,基于自由曲面的非旋转对称性,提出了非常规子孔径拼接理念；研究了非常规子孔径的划分方法,步骤并给出了划分实例；研究了非常规子孔径波前的表征方法,为FSSI的提供了原理方案与技术基础。针对自由曲面的定位匹配难题,提出了一套自由曲面实验与仿真的匹配方法,主要研究了自由曲面旋转匹配方法,轴向定位匹配方法和位姿误差匹配方法。完成了被测面的高精度匹配建模,成为FSSI系统精度的有力保障。在子孔径划分完成和全口径精确定位匹配建模的基础上,研究了非常规子孔径拼接算法。提出了基于系统模型的多孔径同步逆向优化重构(Multi-aperture simultaneous reverse optimizing reconstruction, MSROR)算法；通过计算机仿真研究了MSROR算法的面形检测精度。该研究为FSSI提供了高精度算法,是FSSI技术的最重要的组成部分。同时,将MSROR算法成功应用于非球面顶点曲率半径精确测量。研究了FSSI样机布局装配与误差标定技术。讨论了实际FSSI实验样机的布局与装配,并分析了影响FSSI技术精度的主要因素；继而,进行FSSI系统的误差标定,提出了以FSSI系统为代表的非零位干涉检测系统误差标定方法：逆向优化误差标定法,并实验验证了FSSI系统经过误差标定后对于球面的高检测精度,为最终的FSSI实验实现提供了实际精度保证。对FSSI技术与系统进行了实验验证研究。完成了浅度抛物面(偏离顶点球9μm)顶点球曲率半径的测量,测量相对精度达到0.016%；非球面(偏离顶点球50μm)环形子孔径拼接实验结果相比于ZYGO verifire子孔径扫描干涉仪检测结果,检测精度优于1/50λ (rms);双圆锥面扇形子孔径拼接实验结果与轮廓仪结果相比,检测精度约1/50λ(rms);。证明了FSSI技术与系统对于光学自由曲面的非常规子孔径拼接检测的有效性与精确性,将FSSI技术理论变为了现实。
[Abstract]:Because of its larger surface freedom, optical free-form surface can provide or correct different aberrations on or out of axis, and meet the requirements of high performance, lightweight and miniaturization of modern optical system, and gradually become a new favorite in modern optical engineering. The high precision requirement of the surface shape of optical element limits the large-scale application of the free surface. In particular, the detection technology of free surface has become the most important factor restricting its application. As one of the most accurate detection methods, interferometry has been obtained in the field of optical plane, spherical and aspheric detection. It is universally acknowledged that high precision zero position interference detection can be achieved with the aid of a specially designed compensator, but the design, detection and adjustment of the zero position compensator will introduce errors. For those non regular, non rotating symmetric optical free-form surfaces, the special CGH must be used to compensate. The CGH components are costly, difficult, and difficult to process, and It is difficult to adjust the measurement range and measurement accuracy. Therefore, people turn their eyes to the sub aperture stitching technology. Although the sub aperture stitching detection technology has high detection precision in the detection of large aperture spherical surface and medium aspherical surface, it is still used in the non rotation symmetric free surface detection. There is no substantial breakthrough. In this paper, a set of Free form surface subaperture stitching interferometry, FSSI (FSSI) technology and system is proposed. The subaperture stitching interference detection technique is successfully applied to free surface detection. The main research contents include: the research of the FSSI system scheme and the simulation side Method, based on the non rotation symmetry of free surface, the idea of unconventional aperture stitching is proposed. The method of dividing the unconventional aperture is studied, the steps are given and the example is given. The characterization method of the unconventional aperture wavefront is studied. The principle scheme and the technical basis for the FSSI are provided. A set of matching method for free surface experiment and simulation is proposed. It mainly studies the rotation matching method of free surface, the matching method of axial orientation and the matching method of position and posture error. It completes the modeling of the high precision matching of the measured surface, and becomes the powerful guarantee of the precision of the FSSI system. Based on the research of the unconventional aperture stitching algorithm, the Multi-aperture simultaneous reverse optimizing reconstruction (MSROR) algorithm based on the system model is proposed, and the surface detection precision of the MSROR algorithm is studied by computer simulation. This study provides a high precision algorithm for FSSI. It is the most important component of the FSSI technology. At the same time, the MSROR algorithm is successfully applied to the accurate measurement of the vertex curvature radius of the aspheric surface. The layout assembly and error calibration technology of the FSSI prototype are studied. The layout and assembly of the actual prototype of the FSSI experiment are discussed, and the main factors affecting the precision of the FSSI technology are analyzed. Then, the FSSI system is carried out. The error demarcation is put forward. The error calibration method of the non zero position interference detection system, represented by the FSSI system, is put forward, the reverse optimization error calibration method is used, and the experiment verifies the high detection precision for the spherical surface after the error calibration of the FSSI system, and provides the actual precision guarantee for the final FSSI experiment realization. The experimental test of the FSSI technology and the system is carried out. The measurement of the curvature radius of the shallow paraboloid (deviating from the vertex ball 9 m) has been completed, and the relative precision of the measurement is 0.016%. The experimental results of the circular sub aperture stitching for aspheric (deviating from the top spot ball 50 m) are better than the ZYGO verifire sub aperture scanning interferometer. The detection accuracy is better than that of 1/50 (RMS); the double circular cone sector hole hole is more accurate. Compared with the results of profilometer, the measurement accuracy of the diameter splicing is about 1/50 [RMS], which proves the validity and accuracy of the FSSI technology and the system for the unconventional aperture stitching detection of the optical free-form surface, and the FSSI technology theory is changed to the reality.
【学位授予单位】：浙江大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：O436.1

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