硅基纳米光波导谐振腔非线性光学特性及调控

发布时间：2018-11-13 16:54

【摘要】：硅基纳米光波导是在亚波长尺度实现光信息传输、耦合、与物质相互作用的低损耗导波结构,可构成光源、功能敏感单元,是光电集成传感和光信息芯片的基础,且绝缘体上硅(SOI)一系列重大的研究突破使得硅基材料被认为是构建集成光子器件的理想平台。然而这种全光互连的器件如果要应用到大众消费市场必须基于低成本的技术。所以具有高集成度的硅基光子技术微纳米光学器件掀起了全球的学术界和工业界研究热潮。本文围绕硅光子器件中的关键组成—硅基波导谐振器的相关特性及其应用进行分析研究。该谐振器主要由纳米波导光栅、传输光波导、高品质因子(Q)环形微腔在同一平面制备集成。对于性能优良高集成的硅波导谐振器,其主要影响因素有:高效的光导入(耦合),传输波导的低损耗以及高Q谐振腔等多方面的挑战。本文基于纳米光波导单模(TE模)传输条件下,如何抑制波导传输损耗,提高纳米光栅垂直耦合效率,保持谐振腔高Q值进行理论分析,其次对波导谐振器的温度特性,光学线性特性进行测试分析,对光学非线性特性及全光学开关等相关应用进行了实验研究。相关研究内容可归结为以下几个方面:1、利用FDTD和RSOFT软件对纳米光波导结构单元中的纳米光栅、条形波导、光波导微腔进行了光学传输特性分析。首先对传输光波导的单模传输特性进行数值分析,对光波导传输损耗进行分析优化;其次,基于光学单模传输,给出光栅耦合效率的计算方法,对光栅耦合效率影响的主要参数光栅深度、周期与占空比等进行优化分析,最终确定周期为590nm、占空比为50%的纳米光栅结构,传输纳米光波导宽度为450nm,厚度为220nm。在理论分析微环谐振腔主要性能参数的基础上,重点分析了纳米光波导微腔与传输波导耦合系数、传输损耗的影响机制,并对相关参数进行数值仿真分析。最后利用L-Edit软件对微腔谐振器集成单元进行了优化设计。2、通过微纳跨尺度工艺模式,结合电子束曝光与深硅刻蚀技术,通过采用Bosch工艺循环干法刻蚀方法,提高传输波导侧壁陡直度,降低了传输波导损耗,克服了微纳一体化制备中的邻近效应、迟滞效应、微掩膜效应等工艺技术难点,制备了硅基集成纳米光栅、传输光波导、谐振单元一系列不同结构的微腔谐振器结构。3、基于高Q单环微腔,首先对微腔的线性特性进行了测试分析,得到了传输损耗为0.532dB/cm和品质因子为105高Q值微腔,同时对微腔的温度特性进行了测试,谐振波长的线性度为54.1pm/℃。其次研究了硅基微环谐振腔的光信号调控技术,利用单微腔结构,通过单光束功率调控注入方式分析了微腔的光学热非线性特性,得到谐振峰红移阈值0.34nm。在理论分析光学开关的基础上,研究了基于热非线性效应的双光束调控注入模式的微环谐振腔全光开关的方案,通过调控优化对应波长的光功率实现了消光比为15dB和开关时间为微秒量级的全光学开关;其次分析了单微环谐振腔的光延时特性,通过调控两个相邻谐振波长的光功率,发现探测光功率的大小与光延时量成正比关系,通过相互调控最终获得了15.4ps和8.5ps的最大延时量。
[Abstract]:The silicon-based nano-optical waveguide is a low-loss guided wave structure capable of realizing optical information transmission, coupling and interaction with a substance in a sub-wavelength scale, and a series of major research breakthroughs on silicon-on-insulator (soi) have enabled the silicon-based material to be considered an ideal platform for building an integrated photonic device. such a full-light interconnection device, however, must be based on low-cost technology if it is to be applied to the mass consumer market. So the micro-nano-optical device with high integration of silicon-based photonic technology has raised the research upsurge of academic and industry in the world. In this paper, the related properties of silicon-based waveguide resonators and their applications are analyzed and studied. The resonator is mainly composed of a nano-waveguide grating, a transmission optical waveguide and a high-quality factor (Q) annular micro-cavity to be integrated in the same plane. The main influencing factors of the high-performance and high-integrated silicon waveguide resonator are: high-efficiency light introduction (coupling), low loss of the transmission waveguide, and high-Q resonant cavity. In this paper, based on the single mode (TE mode) transmission of the nano-optical waveguide, how to suppress the transmission loss of the waveguide, to improve the vertical coupling efficiency of the nano-grating, to maintain the high Q value of the resonant cavity for theoretical analysis, and then to test and analyze the temperature characteristic and the optical linear characteristic of the waveguide resonator, The optical non-linear characteristic and all-optical switch and other related applications have been experimentally studied. The content of the relevant research can be reduced to the following aspects: 1. The optical transmission characteristics of the nano-grating, the strip-shaped waveguide and the optical waveguide micro-cavity in the structural unit of the nano-optical waveguide are analyzed by using the FDTD and RSOFT software. firstly, carrying out numerical analysis on the single-mode transmission characteristic of the transmission optical waveguide, and analyzing and optimizing the transmission loss of the optical waveguide; secondly, based on the optical single-mode transmission, the calculation method of the grating coupling efficiency is given, the main parameter grating depth influenced by the grating coupling efficiency is obtained, and the period and the duty ratio are optimized and analyzed, the nano-grating structure with the period of 590nm and the duty ratio of 50 percent is finally determined, the width of the transmission nano-optical waveguide is 450nm, and the thickness is 220nm. On the basis of the theoretical analysis of the main performance parameters of the micro-ring resonator, the influence mechanism of the coupling coefficient and transmission loss of the micro-cavity of the nano-optical waveguide and the transmission waveguide is analyzed, and the relevant parameters are simulated and analyzed. and finally, the micro-cavity resonator integrated unit is optimized and designed by the L-Edit software. the loss of the transmission waveguide is reduced, the technical difficulties of the adjacent effect, the hysteresis effect, the micro-mask effect and the like in the micro-nano integral preparation are overcome, the silicon-based integrated nano-grating, a transmission optical waveguide and a series of micro-cavity resonator structures with different structures are prepared, Based on the high-Q single-ring micro-cavity, the linear characteristic of the micro-cavity is firstly tested and analyzed, the micro-cavity with a transmission loss of 0.532dB/ cm and a quality factor of 105 is obtained, and the temperature characteristic of the micro-cavity is tested, and the linearity of the resonance wavelength is 54. 1pm/ DEG C. Secondly, the optical signal control technology of the silicon-based micro-ring resonator was studied, and the optical thermal nonlinear characteristics of the micro-cavity were analyzed by single-beam power control and injection, and the red-shift threshold of the resonance peak was 0.34nm. Based on the theoretical analysis of the optical switch, the scheme of the full-optical switch of the micro-ring resonator based on the thermal non-linear effect is studied, and the full optical switch with the extinction ratio of 15dB and the switching time of the order of microsecond is realized by controlling the optical power of the corresponding wavelength. Secondly, the optical delay characteristics of the single micro-ring resonator are analyzed. By controlling the optical power of two adjacent resonant wavelengths, it is found that the magnitude of the detected optical power is in direct proportion to the amount of light delay, and the maximum delay amount of 15. 4ps and 8. 5ps is finally obtained by mutual control.
【学位授予单位】：中北大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TN252

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