多孔纳米金属氧化物半导体结构设计及其传感器应用

发布时间：2018-01-12 23:00

本文关键词：多孔纳米金属氧化物半导体结构设计及其传感器应用　出处：《吉林大学》2017年硕士论文　论文类型：学位论文

【摘要】：近几十年来,大气环境污染问题变得日益严峻,受到人们越来越多的关注。为了检测存在于空气中的有毒有害气体,气体传感器起到了重要作用,在日常生活中得到了普遍应用。金属氧化物在制作高灵敏度气体传感器这一领域,受到了研究者的持续关注及深入研究。La系元素由于其具有的某些特殊性质在近十几年间受到了人们的广泛关注。La系元素掺入或附着表面的氧化物半导体在众多领域得到了应用,但在气体传感器领域的研究还并不完善,仍有待深入研究。本文采用静电纺丝法分别制备了La系元素掺杂的管状、多孔管状、破裂的多孔管状In_2O_3纳米纤维。另外,我们采用水热法制备了花状多孔Zn O,制备了基于它们的气体传感器,并研究了其气敏性能。具体内容如下:1.通过静电纺丝制备了Er-doped In_2O_3纳米管,基于该材料的传感器的最佳工作温度经实验测量后为260℃,对20 ppm甲醛的灵敏度为12,响应恢复时间分别为5 s和38 s。该传感器具有优异的选择性。2.用简单纺丝法合成了Yb-doped In_2O_3纳米管,以其为敏感材料制作了传感器,该器件的最佳工作温度为230℃,对100 ppm甲醛的灵敏度为69.8,响应恢复时间分别为4 s和84 s,对甲醛的最低检测浓度为100 ppb,灵敏度为2.5。3.成功制备了破裂多孔管状Sm-doped In_2O_3纳米纤维,以其为敏感材料的气体传感器的最佳工作温度为240℃,对100 ppm甲醛的灵敏度为66.82,响应恢复时间分别为10 s和34 s。4.利用单管电纺合成了多孔管状Nd-doped In_2O_3纳米纤维,制作了基于该材料的气体传感器,该传感器在240℃下对100 ppm甲醛的灵敏度为44.6,响应恢复时间分别为15 s和50 s,其对甲醛的最低检测浓度为100 ppb,灵敏度为2.2。此外,本实验成功制备了破裂多孔管状Nd-doped In_2O_3纳米纤维,基于此种材料的传感器在240℃时对100 ppm甲醛的灵敏度为46.8,响应恢复时间分别为8 s和22 s,对甲醛的最低检测浓度为100ppb,灵敏度为2.4。5.利用水热法制备了多孔花状Zn O,以其为气敏材料制作了传感器,该器件在280℃时对50 ppm丙酮的灵敏度为97.8,响应恢复速度为2 s和23 s。该传感器对丙酮具有优异的选择性能。
[Abstract]:In recent decades, the atmospheric environment pollution problem has become increasingly serious, more and more attention. In order to detect toxic and harmful gases in the air, the gas sensor has played an important role, has been widely used in our daily life. The metal oxide in the field of manufacture of high sensitivity gas sensor, by the sustained attention researchers and research of.La series elements because it has some special properties in recent years has been widespread concern of.La doped oxide semiconductor or attachment surface has been applied in many fields, but the research in the field of gas sensor is not perfect, still need to be further studied. This paper made tube La, doped were prepared by electrospinning porous tubular, porous tubular In_2O_3 nano fiber rupture. In addition, we were prepared by hydrothermal method Porous flower like Zn O, preparation of gas sensors based on their research and their gas sensing properties. The specific contents are as follows: 1. by electrospinning Er-doped In_2O_3 nanotubes, the optimum temperature sensor of the material based on the experimental measurement is 260. The sensitivity of 20 ppm of formaldehyde was 12. The response and recovery time were 5 s and 38 S., the sensor has excellent selective.2. Yb-doped In_2O_3 nanotubes were synthesized by a simple spinning method, with its sensitive materials produced by the sensor, the optimal operating temperature of the device is 230 DEG C, the sensitivity of 100 ppm formaldehyde is 69.8, the response and recovery time were 4 and s 84 s, the minimum detectable concentration of formaldehyde is 100 ppb, the sensitivity of 2.5.3. was prepared successfully cracked porous tubular Sm-doped In_2O_3 nanofibers, the optimal operating temperature of the gas sensor for sensitive material is 240 DEG C to 100. The sensitivity of ppm formaldehyde was 66.82, the response and recovery time were 10 s and 34 s.4. using single electrospun porous tubular Nd-doped In_2O_3 nanofibers were synthesized and fabricated gas sensor based on the material of the sensor under the temperature of 240 DEG C sensitivity to 100 ppm of formaldehyde was 44.6, the response recovery time were 15 s and 50 s, the formaldehyde, the minimum detectable concentration was 100 ppb, the sensitivity is 2.2., in addition, this experiment successfully prepared fracture porous tubular Nd-doped In_2O_3 nanofibers, based on the sensor of this material at 240 DEG C sensitivity to 100 ppm of formaldehyde was 46.8, the response and recovery time were 8 s and 22 s, the minimum detectable concentration the formaldehyde is 100ppb, sensitivity is 2.4.5. by hydrothermal method to prepare porous flower like Zn O, the gas sensitive materials produced by the sensor, the device at 280 DEG C sensitivity to 50 ppm acetone was 97.8, the response speed of recovery The sensor has excellent selection performance for acetone for 2 s and 23 s..

【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212;TB383.1

【相似文献】