压电陶瓷微定位平台的迟滞非线性补偿方法研究

发布时间：2018-02-28 06:16

本文关键词： 压电陶瓷微定位平台迟滞非线性率相关特性 KP静态模型快速Terminal滑模控制　出处：《吉林大学》2017年硕士论文　论文类型：学位论文

【摘要】：微纳米定位技术被广泛应用于精密制造、生物医学和微电子等领域,成为了现代高新科技中的关键技术。压电陶瓷微定位平台是实现这一技术的核心器件,但由于压电陶瓷本身固有的迟滞非线性以及蠕变特性等,使得微定位平台的控制精度降低,瞬间响应速度变慢。本文以压电陶瓷微定位平台为研究对象,以消除或降低迟滞非线性对定位精度的影响为目标,分别对压电陶瓷微定位平台的迟滞非线性建模和补偿方法进行了研究。首先对压电陶瓷微定位平台的构成进行介绍,并结合压电陶瓷微定位平台的国内外研究现状,总结出迟滞非线性的建模及补偿方法的研究成果。然后,为了实现对平台迟滞非线性的描述,通过对各种迟滞非线性模型的优缺点进行比较和分析,本文最终选用KP静态模型描述压电陶瓷微定位平台的迟滞非线性,并分别采用布谷鸟搜索算法、粒子群和布谷鸟混合优化算法对KP静态模型中的密度参数进行辨识,进而得到高精确度的迟滞模型。由于压电陶瓷微定位平台不仅具有迟滞特性,还具有频率特性,所以对其频率特性进行了分析,并在KP静态模型的基础上建立KP率相关模型。最后,通过仿真验证了所提模型的有效性,仿真结果表明,在相同迭代次数下,使用粒子群和布谷鸟混合优化算法辨识得到的模型精度更高。为了降低和消除迟滞非线性对平台控制精度的影响,本文提出了三种控制方案。第一种控制方案是迟滞逆模型补偿的前馈控制方案。在建立精确度较高的KP静态模型之后,采用递推法建立KP静态逆模型和KP率相关逆模型。并以建立的逆模型作为前馈控制器,对压电陶瓷微定位平台进行开环控制实验。但是逆模型前馈控制属于开环控制,无法消除建模误差对系统的影响,而且抗干扰能力差。为此,提出了PID和逆模型相结合的复合控制。该控制方法通过逆补偿抵消迟滞非线性,通过PID控制抑制不确定性和未抵消的迟滞非线性。为了进一步提高控制精度,增强系统的抗干扰能力,结合滑模控制的优点,提出了无需逆模型的快速Terminal滑模控制方案,并用Lyapunov函数证明了系统的全局稳定性。通过实验验证了所提方法的有效性,且与前面两种控制方法相比,快速Terminal滑模控制方法的控制精度最高。
[Abstract]:Micro-nano positioning technology has been widely used in the fields of precision manufacturing, biomedicine and microelectronics, and has become the key technology in modern high and new technology. Piezoelectric ceramic micro-positioning platform is the core device to realize this technology. However, due to the inherent hysteresis nonlinearity and creep characteristics of piezoelectric ceramics, the control accuracy of the micro-positioning platform is reduced and the instantaneous response speed is slowed down. In this paper, the piezoelectric ceramic micro-positioning platform is taken as the research object. In order to eliminate or reduce the influence of hysteresis nonlinearity on positioning accuracy, the modeling and compensation methods of hysteresis nonlinearity of piezoelectric ceramic micro-positioning platform are studied respectively. Firstly, the structure of piezoelectric ceramic micro-positioning platform is introduced. Combined with the research status of piezoelectric ceramic micro-positioning platform at home and abroad, the research results of modeling and compensation methods of hysteresis nonlinearity are summarized. Then, in order to describe the hysteresis nonlinearity of the platform, By comparing and analyzing the advantages and disadvantages of various nonlinear hysteresis models, KP static model is used to describe the hysteresis nonlinearity of piezoelectric ceramic micro-positioning platform, and the cuckoo search algorithm is used respectively. The density parameters in KP static model are identified by particle swarm optimization and cuckoo hybrid optimization algorithm, and a high precision hysteresis model is obtained. The piezoelectric ceramic micro-positioning platform not only has hysteresis characteristics, but also has frequency characteristics. Therefore, the frequency characteristics of the model are analyzed, and the KP rate correlation model is established on the basis of KP static model. Finally, the validity of the proposed model is verified by simulation. The simulation results show that, under the same number of iterations, In order to reduce and eliminate the influence of hysteresis nonlinearity on the control accuracy of platform, the hybrid optimization algorithm of particle swarm optimization and cuckoo bird is used to identify the model with higher accuracy. In this paper, three control schemes are proposed. The first control scheme is feedforward control scheme for hysteresis inverse model compensation. The static inverse model of KP and the inverse model of KP rate correlation are established by recursive method, and the inverse model is used as feedforward controller to carry out open-loop control experiment on piezoelectric ceramic micro-positioning platform, but the inverse model feedforward control belongs to open-loop control. The influence of modeling error on the system can not be eliminated, and the anti-jamming ability is poor. Therefore, a hybrid control method combining PID and inverse model is proposed. The control method cancels the hysteresis nonlinearity by inverse compensation. In order to further improve the control accuracy and enhance the anti-jamming ability of the system, a fast Terminal sliding mode control scheme without inverse model is proposed, which combines the advantages of sliding mode control. The global stability of the system is proved by Lyapunov function, and the effectiveness of the proposed method is verified by experiments. Compared with the two control methods, the fast Terminal sliding mode control method has the highest control accuracy.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP273;TN384

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