S波段窄带带通BAW滤波器设计

发布时间：2018-05-02 12:17

本文选题：滤波器 + BAW　；参考：《西南科技大学》2017年硕士论文

【摘要】：由FBAR组成的BAW滤波器能够满足目前高性能射频前端滤波的要求,是一种全新的射频滤波器解决方案。基于XX机构给出的技术指标,结合工艺约束条件,设计了一个满足各项指标的,中心频率为2.460 GHz,带宽为41MHz,带内插损为-1.154 d B,带内纹波为0.9 d B,带外抑制为-42.5d B@2.390 GHz;-45.5d B@2.500 GHz的S波段窄带带通BAW滤波器。所设计的滤波器的各项指标值均优于设计指标中的要求。设计的滤波器具有较低的带内插损、较高的带外抑制,能够满足当前S波段无线通信的应用。具体工作包括:在第三章中,通过调节电极/压电层厚度设计了一个具有较高k2eff,同时可以获得较小平面尺寸的FBAR各膜层厚度参数。通过电极变迹的方法设计了各FBAR形状,该方法能够抑制寄生模式,提高FBAR的Q值。在第四章中,使用Mason模型设计并优化得到了一个满足各项指标(带宽、中心频率、带外抑制和带内插损以及纹波)的S波段BAW滤波器的结构参数。并通过一个电感有效改善了BAW滤波器的带外抑制。在第五章中,设计并验证了一个BAW滤波器的布局结构。该布局结构能够减少寄生电感、寄生电容、欧姆损耗对BAW滤波器性能的影响。为了评估使用Mason模型设计的S波段BAW滤波器的性能,建立了BAW滤波器的声-电磁协同仿真模型。由于仿真得到的带内纹波不满足指标要求,因此重新设计了BAW滤波器的结构参数,直到成功通过声-电磁协同仿真模型的性能验证。根据该布局结构,设计了BAW滤波器的加工工艺流程以及光刻掩膜版图。主要创新点为:1.研究得到了“当电感串联在面积最大的并联FBAR支路,使用的电感值最小”的结论。2.提出并验证了一种BAW滤波器的布局准则及方法。3.建立了BAW滤波器的声-电磁协同仿真模型。
[Abstract]:The BAW filter composed of FBAR can meet the requirements of high performance RF front-end filter and is a new RF filter solution. Based on the technical index given by XX mechanism and combined with the process constraint condition, a new method is designed to meet the requirements. The center frequency is 2.460 GHz, the bandwidth is 41 MHz, the band insertion loss is -1.154 dB, the in-band ripple is 0.9 dB, and the out-of-band suppression is -42.5 dB 2.390 GHz -45.5 dB 2.500 GHz narrow band bandpass BAW filter. All the index values of the designed filter are better than the requirements of the design index. The designed filter has lower band interpolation loss and higher out-of-band suppression, which can meet the current S-band wireless communication applications. The main work includes: in chapter 3, the thickness parameters of FBAR films with high k2effs are designed by adjusting the thickness of the electrode / piezoelectric layer, and the thickness parameters of each layer of FBAR are obtained at the same time. The shapes of FBAR were designed by the method of electrode apodization. This method can suppress the parasitic mode and increase the Q value of FBAR. In chapter 4, a S-band BAW filter is designed and optimized by using Mason model, which meets the requirements of bandwidth, central frequency, out-of-band suppression and insertion loss, and ripple. An inductor is used to effectively improve the out-of-band suppression of BAW filters. In chapter 5, we design and verify the layout of a BAW filter. The structure can reduce the influence of parasitic inductance, parasitic capacitance and ohmic loss on the performance of BAW filter. In order to evaluate the performance of S-band BAW filter designed with Mason model, the acousto-electromagnetic cooperative simulation model of BAW filter is established. Because the in-band ripple obtained by simulation does not meet the requirements of the target, the structural parameters of the BAW filter are redesigned until the performance of the acousto-electromagnetic cooperative simulation model is successfully verified. According to the layout, the processing process and photolithographic mask layout of BAW filter are designed. The main innovation point is: 1. The conclusion that "the inductance is minimum when the inductance is in series at the parallel FBAR branch with the largest area" is obtained. A layout criterion and method of BAW filter. 3. The acousto-electromagnetic cooperative simulation model of BAW filter is established.
【学位授予单位】：西南科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN713

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