多线切割机的张力控制方法的研究

发布时间：2018-04-12 20:44

本文选题：多线切割机 + 张力控制　；参考：《武汉理工大学》2013年硕士论文

【摘要】：由于多线切割机具有效率高、工艺好、成本低的优点,它已经成为半导体材料切割行业的主导设备,但是因为多线切割机的制造难度较大,国产设备的控制技术还不完善,其核心技术长期被外国的极少数公司所垄断,国内市场的多线切割机还主要依靠进口,严重制约了我国半导体照明、光伏、集成电路制造等产业的发展。因此为了打破国外对我国高精度多线切割机技术和设备的垄断,开发具有自主知识产权的多线切割技术及装备,提高控制精度已成为增强我国高精度设备全球竞争力的关键举措。张力控制技术是多线切割设备控制技术中最为关键之处,要想使我国多线切割设备向高速、高精度方向发展,张力控制技术就必须大幅度提高。由于大型机电张力设备结构复杂、影响因素众多,在不同工况下系统参数存在着较强的藕合性、非线性、时变性和不确定性；在基础理论、检测技术和控制策略等方面都还有许多问题尚需解决,因此,对多线切割机的张力控制系统进行研究成为工程技术人员急需解决的重大研究课题之一。本文分析了张力控制原理、方法和策略,建立了以PLC可编程控制器为主控单元,以交流数字伺服电机为执行元件,采用其转矩控制方式,以张力传感器为反馈元件的闭环张力控制方案。还对张力系统组成进行深入分析研究,对主要元件的参数的选取进行了分析,建立了系统的数学模型,进而获得系统的传递函数。使用MATLAB的M文件编程方式和Simulink工具箱对系统进行仿真分析。考虑到引起多线切割机走线系统稳定性各种不确定因素,指出多线切割机张力系统是一个非线性、时变、多输出的复杂系统。针对张力控制系统的工作特点,采用两种控制算法：第一,积分分离的PID控制,并对参数进行整定,以达到良好的控制效果；第二,模糊PID控制,结合常规PID控制和模糊控制,综合两者优点,既消除了常规模糊控制器的稳态误差,又具有模糊控制器动态性能好的特点,同时改善了PID控制器适应能力差的缺点,大大提高了控制系统的动静态特性和稳定性。除此以外,本文还对系统的软件进行设计分析,主要包括确定采样频率,设计数据采集和数字滤波,动态数据存储,断线报警以及两种控制方法PLC的实现。在多线切割设备上进行实验数据采集,并完成张力的标定以及系统的动态性的分析。
[Abstract]:Because of the advantages of high efficiency, good technology and low cost, multi-wire cutting machine has become the leading equipment in semiconductor material cutting industry. However, because of the difficulty of manufacturing multi-wire cutting machine, the control technology of domestic equipment is not perfect.Its core technology has been monopolized by a few foreign companies for a long time, and the multi-line cutting machines in domestic market mainly rely on imports, which seriously restricts the development of semiconductor lighting, photovoltaic, integrated circuit manufacturing and other industries in China.Therefore, in order to break the monopoly of foreign countries on the technology and equipment of high-precision multi-wire cutting machines in China, we have developed multi-wire cutting technology and equipment with independent intellectual property rights.Improving control accuracy has become a key measure to enhance the global competitiveness of high precision equipment in China.Tension control technology is the most important part of multi-wire cutting equipment control technology. In order to make the multi-wire cutting equipment develop to high speed and high precision, the tension control technology must be greatly improved.Because the structure of large electromechanical tension equipment is complex and the influence factors are numerous, the system parameters have strong coupling, nonlinear, time-varying and uncertainty under different working conditions.There are still many problems to be solved in detection technology and control strategy. Therefore, the research on tension control system of multi-wire cutting machine has become one of the most important research topics for engineers and technicians.In this paper, the principle, method and strategy of tension control are analyzed. The PLC programmable controller is used as the main control unit, and the AC digital servo motor is used as the actuator, and its torque control mode is adopted.A closed loop tension control scheme with tension sensor as feedback element.The composition of the tension system is analyzed, the parameters of the main components are selected, the mathematical model of the system is established, and the transfer function of the system is obtained.Using MATLAB M file programming mode and Simulink toolbox to simulate and analyze the system.Considering all kinds of uncertain factors causing the stability of multi-wire cutting machine running system, it is pointed out that the tension system of multi-wire cutter is a nonlinear, time-varying and multi-output complex system.According to the working characteristics of tension control system, two control algorithms are adopted: first, PID control with integral separation, and setting parameters to achieve good control effect; second, fuzzy PID control, combined with conventional PID control and fuzzy control,Combining the advantages of the two methods, the steady-state error of the conventional fuzzy controller is eliminated, and the dynamic performance of the fuzzy controller is good. At the same time, the disadvantage of the poor adaptability of the PID controller is improved.The dynamic and static characteristics and stability of the control system are greatly improved.In addition, the software of the system is designed and analyzed, including the determination of sampling frequency, the design of data acquisition and digital filtering, dynamic data storage, disconnection alarm and the realization of two control methods, PLC.The experimental data are collected on the multi-wire cutting equipment, and the tension calibration and the dynamic analysis of the system are completed.
【学位授予单位】：武汉理工大学
【学位级别】：硕士
【学位授予年份】：2013
【分类号】：TN305;TP273

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