玻璃内应力高精度检测技术的研究

发布时间：2018-04-27 22:22

本文选题：玻璃应力 + 磁光调制　；参考：《中国科学院研究生院（西安光学精密机械研究所）》2014年博士论文

【摘要】：本文主要讨论了利用磁光调制实现玻璃内应力高精度检测系统的理论分析与工程实现问题。本文首先对玻璃内应力的形成原因及其存在时的影响进行了简要的描述，介绍了应力检测的用途，进而介绍了国内外应力检测技术发展的现状，指出我国应力检测技术与国外的差距。高精度、自动化测量是目前玻璃内应力高端测量领域普遍需要具备的功能，以我国目前内应力检测技术的发展状况，无法满足玻璃内应力高精度测量的需求。国内高精度内应力测量领域均采用国外设备，设备极其昂贵，这就为研究一种新型的、具有国内自主知识产权的高精度玻璃内应力检测技术提出了迫切的需求。磁光调制法是对玻璃内应力进行高精度检测的新途径。论文详细介绍了磁光调制技术测量玻璃内应力的基本原理、结构组成和关键的技术环节，指出了它的性能和特点对于以往的测量方法是一种技术上的改进。文中采用矩阵光学的方式详细推导了系统的基本测量原理以及信号处理方法，并对系统中选用的关键元器件，以及器件和信号处理方法等各个因素对系统测量精度带来的影响，进行了详细的介绍和分析。搭建了实验平台并对进行了实验验证，实验结果证明了该方法相对以往测量系统在测量精度有了一定的提高，且测量应力双折射结果的离散性在0.4nm/cm，该方法测量过程中需要在180°范围内多次旋转待测玻璃和检偏器，以得到足够多的测量数据，来保证拟合结果的准确性，整个过程复杂繁琐，测量时间较长，完成一次测量操作需要2个小时左右的时间，导致系统实用价值不高。根据改变旋光器驱动电压可以控制偏振光旋转角度，达到改变偏振光旋转角度的目的，可以避免旋转检偏器；且待测玻璃的旋转角度和旋光器旋光角度具有一定的关系，增加了解算被测应力双折射和方向的信息，利用这些角度关系能够进行内应力信息的直接解算，就可以避免多次旋转待测玻璃和检偏器。本文根据以上思路提出了磁光调制加旋光器的方法来测量玻璃内应力，对测量原理进行了详细的推导。测量过程中首先进行了旋光器的标定实验，得出了驱动电压和旋光角度的线性关系，根据该关系进而完成了磁光调制加旋光器法测量玻璃内应力的实验，发现了实验过程中存在的问题，电压较大时会使旋光器驱动线圈发热，阻值变化，影响旋光角度。另外，在实验中发现，所加电压的精度的太低，不能精确控制旋光角度，存在一定误差，导致系统测量结果的离散性为0.5nm/cm，且测量时旋转了一次待测玻璃，虽然相对于磁光调制法将测量时间缩短为约5分钟，但仍然无法实现完全自动化测量。本文参考美国Hinds专利技术—双光弹调制测量方法，并借鉴光机所在双磁光调制实现空间方位角度快速测量方面的研究成果，提出了采用双磁光调制的方法来测量玻璃内应力。对测量原理进行了介绍，增加了对光源进行强度调制的方法提高系统的测量精度。进行实验发现，该系统能够实现自动化测量，大大缩短测量时间，15秒内即可完成一次测量过程，且避免了使用平移旋转载物台和细分多齿分度台，，能够缩小测量设备的体积，但所需的用来解算内应力信息的基频信号幅值较小，导致探测信号中直流分量与基频分量的幅值相差极大，给信号检测和处理带来较大的困难，导致最终测量结果的离散性较差。对应力双折射测量结果的离散性为3.1nm/cm，远远不能到达要求。根据采用光弹调制器时交流信号幅值较大的特点，提出了将双磁光调制测量系统改成磁光调制加光弹调制的方法，来提高基频信号的幅值大小，达到提高系统的测量性能的目的，本文对磁光调制加光弹调制的方法测量玻璃内应力的原理进行了理论推导，并将探测基频信号的归一化幅值和双磁光调制的幅值进行了仿真比较，仿真结果表明，在相同的玻璃内应力测量信息条件下，采用磁光调制加光弹调制的方法，基频信号的归一化幅值远远大于双磁光调制时的幅值。最后通过进行验证实验，证实了理论分析的正确性，系统的测量精度与稳定性较高，对应力双折射的测量结果离散性为0.3nm/cm，另外系统的适应性与实用性大大增强，基本指标可以满足高精度玻璃应力双折射测量的需求。通过大量的系统调试与实验，发现了测量系统中存在的一些问题，为后期的系统改进提供了一定的参考依据，并对系统测量性能进一步的提升奠定了基础；另外，针对实验中的不足，最后一章提出了系统改进方案。
[Abstract]:This paper mainly discusses the theoretical analysis and engineering realization of the high accuracy detection system of glass internal stress by magneto-optical modulation.
This paper first briefly describes the causes of the formation of glass internal stress and its influence in existence, introduces the use of stress detection, and then introduces the status of the development of stress detection technology at home and abroad, and points out the gap between China's stress detection technology and foreign countries. High precision, auto dynamic measurement is the high end measurement field of glass internal stress at present. With the development of the current internal stress detection technology in China, the need for high precision measurement of glass internal stress can not be met. Foreign equipment is used in the field of high precision internal stress measurement in China, and the equipment is extremely expensive. This is a new type of high precision glass internal stress with domestic independent intellectual property right. There is an urgent need for the detection technology.
The magneto optic modulation method is a new method for high precision inspection of internal stress of glass. The paper introduces the basic principle, structure composition and key technical link of the measurement of glass internal stress by magnetic and optical modulation technology, and points out that its performance and characteristics are a kind of technical improvement for the previous measurement methods. The basic measurement principle of the system and the method of signal processing are derived in detail, and the influence of the key components in the system, as well as the influence of the components and signal processing methods on the measurement precision of the system, is introduced and analyzed in detail. The experimental platform is set up and the experimental verification is carried out. The experimental results prove that This method has a certain improvement in measurement accuracy compared with the previous measurement system, and the discreteness of the results of measuring stress birefringence is in 0.4nm/cm. In the process of measurement, the glass and detector need to be rotated many times in the range of 180 degrees to get enough measured data to ensure the accuracy of the fitting results, and the whole process is complex and complex. It takes 2 hours to complete a measurement operation, resulting in a low practical value of the system.
The rotation angle of polarized light can be changed by changing the driving voltage of the polarizer to control the rotation angle of polarized light and to change the rotation angle of polarized light. The rotation angle of the glass can be avoided, and the rotation angle of the measured glass has a certain relationship with the optical rotation angle of the optical rotator, and the information of the double refraction and direction of the measured stress is increased, and the relation of these angles can be used. In this paper, a method of magneto optic modulation and optical rotator is proposed to measure the internal stress of glass, and the measuring principle is derived in detail. In the process of measurement, the calibration experiment of the optical rotator is first carried out, and the driving voltage is obtained. According to the linear relationship with the angle of optical rotation, the experiment of measuring the internal stress of glass with magneto optic modulation and optical rotator is completed according to the relationship, and the problems in the experiment are found. When the voltage is large, the driving coil of the optical rotator will be heated, the resistance change and the angle of the optical rotation are affected. In addition, it is found in the experiment that the precision of the added voltage is too low, The angle of the optical rotation can not be controlled accurately and there is a certain error. The dispersion of the system measurement results is 0.5nm/cm, and the measured glass is rotated at the time of measurement. Although the measurement time is shortened to about 5 minutes relative to the magneto-optical modulation method, it is still unable to realize complete automatic measurement.
In this paper, we refer to the United States Hinds patent technology double photoelastic modulation measurement method, and draw on the research results of the rapid measurement of the spatial azimuth by the dual magnetic light modulation of the optical machine. The dual magnetic light modulation method is proposed to measure the internal stress of the glass. The measurement principle is introduced and the intensity modulation of the light source is added. The method improves the measurement precision of the system. The experiment shows that the system can realize automatic measurement, greatly shorten the measurement time, complete a measurement process within 15 seconds, and avoid the use of the translation and rotating carrier platform and the subdivision multi tooth indexing table, and can reduce the volume of the measuring equipment, but the basic frequency required to solve the internal stress information is needed. The amplitude of the signal is small, which leads to the great difference between the amplitude of the DC component and the basic frequency component in the detection signal, which brings great difficulty to the detection and processing of the signal, which leads to the poor discreteness of the final measurement results. The discreteness of the results of the corresponding force birefringence measurement is 3.1nm/cm, far from reaching the requirement.
In order to improve the amplitude of the fundamental frequency signal and improve the measurement performance of the system, a method of changing the dual magnetic light modulation measurement system into magneto optic modulation and photoelastic modulation is proposed to improve the measurement performance of the system. The theoretical derivation is carried out, and the normalized amplitude of the fundamental frequency signal and the amplitude of the dual magnetic modulation are simulated and compared. The simulation results show that the normalized amplitude of the fundamental frequency signal is far greater than the amplitude of the dual magnetic modulation under the same glass internal stress measurement information. Finally, the correctness of the theoretical analysis is confirmed by the verification experiment. The measurement accuracy and stability of the system are high. The result of the measurement result is 0.3nm/cm, and the adaptability and practicability of the system are greatly enhanced. The basic index can meet the requirement of the high precision glass stress birefringence measurement.
Through a large number of system debugging and experiments, some problems in the measurement system are found, which provide some reference for the later system improvement, and lay the foundation for the further improvement of the system measurement performance. In addition, the system improvement scheme is proposed in the last chapter in view of the shortage in the experiment.

【学位授予单位】：中国科学院研究生院（西安光学精密机械研究所）
【学位级别】：博士
【学位授予年份】：2014
【分类号】：TQ171.114

【参考文献】