PyroMEMS安保机构的设计、制备与作动性能研究
发布时间：2018-10-31 08:24
【摘要】：PyroMEMS(Pyrotechnical Micro Electrical Mechanical System)是一种基于 MEMS技术,装载固体含能材料作为功能燃料的微型火工烟火装置。PyroMEMS安保机构是一种以含能材料的燃烧分解为动力源来解除保险的安保装置。本文设计并制备了基于PyroMEMS微驱动器和固态双悬臂梁安保滑块的PyroMEMS安保机构,其主要特点在于不需要使用惯性力解保,实现了安保滑块的较大位移,且可以实现一体化批量制作。论文的主要研究内容及结果如下:(1)采用精密雕刻的方法制备了以PMMA(有机玻璃)为基材的固态双悬臂梁安保滑块;采用等离子体干法刻蚀的方法制备了以硅为基材的固态双悬臂梁安保滑块。(2)设计制备的PyroMEMS微驱动器主要包括三个组成部分:换能元、微点火药和气体发生剂。点火药选用配比为90:10的硅铅丹点火药,粘结剂选用硝化棉,溶剂选用乙酸丁酯。利用喷墨沉积的方式对微点火药进行装药,并对含能油墨进行燃烧性能表征。研究了镍铬桥丝、SCB(半导体桥)及MSCB(微型半导体桥)三种换能元针对硅铅丹点火药的发火性能。(3)通过理论计算和实验,对比研究了NaN_3/Fe_2O_3和C_6H_2(N_O2)_3OK/KClO_4两种气体发生剂的爆温、爆热和产气量。研究发现两种气体发生剂的产气量几乎相同,但C_6H_2(N_O2)_3OK/KClO_4 的爆温和爆热均远大于 NaN_3/Fe_2O_3,C_6H_2(N_O2)_3OK/KClO_4 的做功能力更强。(4)通过ABAQUS模拟软件对安保滑块的作动性能和沿滑块运动方向的过载能力进行了模拟仿真,得出硅基PyroMEMS安保机构的综合性能优于PMMA。PyroMEMS安保机构固态双悬臂梁的长宽比越小,其承受的最大气室压强越高,抗过载能力越强。由PyroMEMS安保机构作动性能的实验与模拟结果获得,当双悬臂梁的尺寸为长×宽=300μm×300μm时,安保机构最大可承受463.62m/s~2的过载,并可以顺利完成解保。通过本论文的研究,掌握了PyroMEMS安保机构的设计与制备方法,获得了PyroMEMS安保机构各组件设计参数对作动性能的影响规律,为开发拥有自主知识产权的安保机构提供了理论和技术参考。
[Abstract]:PyroMEMS (Pyrotechnical Micro Electrical Mechanical System) is a miniature pyrotechnic device with solid energetic materials as its functional fuel based on MEMS technology. PyroMEMS security device is a kind of security device which uses the burning of energetic materials as the power source to remove the safety. In this paper, the PyroMEMS security mechanism based on PyroMEMS microactuator and solid double cantilever beam security slider is designed and fabricated. The main feature of the mechanism is that the large displacement of the security slider can be realized without the use of inertial force, and the integrated batch production can be realized. The main research contents and results are as follows: (1) the solid double cantilever security slider based on PMMA (plexiglass) is fabricated by precision engraving; A solid double cantilever beam security slider based on silicon was prepared by plasma dry etching. (2) the PyroMEMS microactuator is composed of three components: energy transfer element, micro-ignition powder and gas generator. The ratio of ignition powder is 90:10, the binder is nitrified cotton, and the solvent is butyl acetate. Ink-jet deposition was used to charge micro-ignition powder and the burning performance of energetic ink was characterized. The ignition properties of three kinds of energy transfer elements (, SCB () and MSCB (miniature semiconductor bridge) for silicon-lead powder were studied. (3) by theoretical calculation and experiment, The explosion temperature, heat of explosion and gas production of NaN_3/Fe_2O_3 and C_6H_2 (N_O2) _ 3OK/KClO_4 were studied. It was found that the gas production of C_6H_2 (N_O2) _ 3OK/KClO_4 was almost the same, but that of C_6H_2 (N_O2) _ 3OK/KClO_4 was much higher than that of NaN_3/Fe_2O_3,. C_6H_2 (N_O2) _ 3OK/KClO_4 has stronger work ability. (4) the actuation performance of the security slider and the overload ability along the sliding direction are simulated by the ABAQUS simulation software. It is concluded that the smaller the aspect ratio of the solid-state double cantilever beam, the higher the maximum chamber pressure and the stronger the overload resistance of silicon-based PyroMEMS security mechanism. Based on the experimental and simulation results of the actuation performance of the PyroMEMS security apparatus, when the size of the double cantilever beam is 300 渭 m 脳 300 渭 m, the maximum overload of the 463.62m/s~2 can be withstood by the security apparatus, and the decommissioning can be completed successfully. Through the research of this thesis, we master the design and preparation method of PyroMEMS security apparatus, and obtain the law of the influence of the design parameters of each component of PyroMEMS security mechanism on the actuation performance. It provides a theoretical and technical reference for the development of security institutions with independent intellectual property rights.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TJ450.3
本文编号：2301503
[Abstract]:PyroMEMS (Pyrotechnical Micro Electrical Mechanical System) is a miniature pyrotechnic device with solid energetic materials as its functional fuel based on MEMS technology. PyroMEMS security device is a kind of security device which uses the burning of energetic materials as the power source to remove the safety. In this paper, the PyroMEMS security mechanism based on PyroMEMS microactuator and solid double cantilever beam security slider is designed and fabricated. The main feature of the mechanism is that the large displacement of the security slider can be realized without the use of inertial force, and the integrated batch production can be realized. The main research contents and results are as follows: (1) the solid double cantilever security slider based on PMMA (plexiglass) is fabricated by precision engraving; A solid double cantilever beam security slider based on silicon was prepared by plasma dry etching. (2) the PyroMEMS microactuator is composed of three components: energy transfer element, micro-ignition powder and gas generator. The ratio of ignition powder is 90:10, the binder is nitrified cotton, and the solvent is butyl acetate. Ink-jet deposition was used to charge micro-ignition powder and the burning performance of energetic ink was characterized. The ignition properties of three kinds of energy transfer elements (, SCB () and MSCB (miniature semiconductor bridge) for silicon-lead powder were studied. (3) by theoretical calculation and experiment, The explosion temperature, heat of explosion and gas production of NaN_3/Fe_2O_3 and C_6H_2 (N_O2) _ 3OK/KClO_4 were studied. It was found that the gas production of C_6H_2 (N_O2) _ 3OK/KClO_4 was almost the same, but that of C_6H_2 (N_O2) _ 3OK/KClO_4 was much higher than that of NaN_3/Fe_2O_3,. C_6H_2 (N_O2) _ 3OK/KClO_4 has stronger work ability. (4) the actuation performance of the security slider and the overload ability along the sliding direction are simulated by the ABAQUS simulation software. It is concluded that the smaller the aspect ratio of the solid-state double cantilever beam, the higher the maximum chamber pressure and the stronger the overload resistance of silicon-based PyroMEMS security mechanism. Based on the experimental and simulation results of the actuation performance of the PyroMEMS security apparatus, when the size of the double cantilever beam is 300 渭 m 脳 300 渭 m, the maximum overload of the 463.62m/s~2 can be withstood by the security apparatus, and the decommissioning can be completed successfully. Through the research of this thesis, we master the design and preparation method of PyroMEMS security apparatus, and obtain the law of the influence of the design parameters of each component of PyroMEMS security mechanism on the actuation performance. It provides a theoretical and technical reference for the development of security institutions with independent intellectual property rights.
【学位授予单位】：南京理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TJ450.3
【参考文献】
相关期刊论文 前10条
1 席占稳;李志超;毕珊;胡红生;;MEMS引信保险机构的驱动器研究[J];弹道学报;2010年01期
2 石庚辰;李华;;引信MEMS远距离解除保险机构[J];探测与控制学报;2008年03期
3 崔占忠;;引信发展若干问题[J];探测与控制学报;2008年02期
4 冯鹏洲;朱继南;吴志亮;;美国典型MEMS引信安全保险装置分析[J];探测与控制学报;2007年05期
5 冯红艳;李艳;张琳;吴蓉;王俊德;朱顺官;;原子发射光谱双谱线法测量半导体桥(SCB)等离子体温度(英文)[J];含能材料;2007年02期
6 何光;石庚辰;;基于MEMS技术的平面W型微弹簧刚度特性研究[J];北京理工大学学报;2006年06期
7 徐振相,周彬,秦志春,陈西武,郑桂富;微电子火工品的发展及应用[J];爆破器材;2004年S1期
8 成一,陈守文;PAK气体发生剂的燃气特性研究[J];固体火箭技术;2001年04期
9 成一,陈守文;点火药点火性能的研究[J];火工品;2001年04期
10 丁建宁,孟永钢,温诗铸;多晶硅微悬臂梁断裂失效强度的尺寸效应[J];中国机械工程;2001年11期
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