精密仪器用主动隔振系统的结构设计与分析

发布时间：2018-02-09 12:32

本文关键词： 精密仪器主动隔振系统结构设计有限元建模动力学分析　出处：《华中科技大学》2014年硕士论文　论文类型：学位论文

【摘要】：微振动是影响精密仪器、设备精度和性能的关键因素。随着精密仪器设备精度的不断提高，市场对精密隔振系统的性能要求也越来越高。本文参考现有的隔振系统设计方案，从隔振系统支撑方式、关键部件的布置、选型和设计以及隔振性能测试三个方面进行了相关研究。本文分析隔振系统的隔振需求，参考现有隔振产品的性能参数，提出了主动隔振系统的设计要求和隔振系统的设计方案；对隔振系统结构形式、传感器和作动器的布置、弹性元件和作动器的选型设计进行了分析；建立了线性化的隔振系统动力学模型。对压缩弹簧进行设计和分析校核；建立了压缩弹簧的有限元模型，对压缩弹簧轴向和径向刚度以及屈曲模态进行了分析；测试了压缩弹簧的轴向刚度，测试结果和有限元分析误差为5.1%。设计了台面的详细结构；建立了上板结构的有限元模型，分析其自由模态；进行上板的试验模态测试，上板的一阶模态固有频率达到106.8Hz，测试结果和有限元分析结果的误差在10%以内。计算了隔振系统的各阶固有频率；设计隔振系统激振试验测试其固有频率，，测试结果与理论模型较为吻合；测试了隔振系统的传递率，主动隔振带宽在1-200Hz，主动控制下被动共振峰处的传递率降低了28dB。
[Abstract]:The microvibration is the key factor to affect the precision and performance of precision instruments. With the continuous improvement of precision instruments, the market demands higher and higher performance of precision vibration isolation system. This paper refers to the existing design scheme of vibration isolation system. The supporting mode of vibration isolation system, the layout of key components, the selection and design of vibration isolation system and the performance test of vibration isolation system are studied in this paper. In this paper, the vibration isolation requirements of the isolation system are analyzed, and the design requirements of the active vibration isolation system and the design scheme of the isolation system are put forward with reference to the performance parameters of the existing isolation products, and the structural form of the isolation system, the arrangement of the sensors and actuators, the design of the vibration isolation system and the design of the vibration isolation system are presented. The selection and design of elastic elements and actuators are analyzed, and the dynamic model of vibration isolation system is established. The finite element model of compression spring is established, the axial and radial stiffness and buckling mode of compression spring are analyzed, and the axial stiffness of compression spring is tested. The error between test results and finite element analysis is 5.1. The detailed structure of the platform is designed, the finite element model of the upper plate structure is established, and its free mode is analyzed. The natural frequency of the first mode of the upper plate is 106.8 Hz, and the error between the test results and the finite element analysis results is less than 10%. The natural frequencies of the vibration isolation system are calculated, the natural frequencies of the vibration isolation system are tested by the excitation test, the test results are in good agreement with the theoretical model, and the transmission rate of the vibration isolation system is tested. The bandwidth of active vibration isolation is 1 ~ 200 Hz and the transfer rate of passive resonance peak decreases by 28 dB under active control.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB535.1

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