MEMS矢量水听器灵敏度自动测试系统设计

发布时间：2018-02-13 13:19

本文关键词： 矢量水听器微机电系统灵敏度测试装置自动化　出处：《强激光与粒子束》2017年04期 　论文类型：期刊论文

【摘要】：针对微机电系统(MEMS)矢量水听器声压灵敏度测试中出现的测试步骤单一、测试任务繁重且耗时多,同时手动测量存在不确定的操作误差等问题,在分析矢量水听器灵敏度测试原理和测试过程的基础上,采用AD9850,AD8599,PGA205、单片机MK60DN512ZVLQ110等芯片,设计了集成信号激励源、微弱信号检测、调理以及信号采样和传输等模块的矢量水听器灵敏度自动测试装置。该装置将测试现场的仪器"缩小",多模块功能集成,通过与PC上位机连接控制,快速、实时地完成矢量水听器灵敏度测试标定,在节约测试时间的同时,也能快速地完成对水听器的优化改进的验证;此装置体积小、轻便,测试连线简单,方便外场测试,促进MEMS水听器工程化应用。
[Abstract]:In order to solve the problems of single test step, heavy task and time consuming in testing the acoustic pressure sensitivity of MEMS vector hydrophone, there are many problems in manual measurement, such as uncertain operation error, etc. On the basis of analyzing the principle and process of the sensitivity test of vector hydrophone, the integrated signal excitation source and weak signal detection are designed by using AD9850 / AD8599PGA205, single chip microcomputer MK60DN512ZVLQ110 and so on. Automatic testing device for vector hydrophone sensitivity of conditioning and signal sampling and transmission modules. The device "shrinks" the instrument in the field of test, integrates multi-module functions, and controls the sensitivity of vector hydrophone by connecting with PC. The sensitivity test calibration of vector hydrophone can be completed in real time, while saving the test time, it can also quickly complete the verification of the optimization and improvement of the hydrophone, the device is small in size, light in size, simple in testing connection, convenient for field testing, Promote the engineering application of MEMS hydrophone.
【作者单位】：中北大学仪器科学与动态测试教育部重点实验室;苏州中盛纳米科技有限公司;
【基金】：国家自然科学基金项目(61127008) 国家重点研发计划项目(2016YFC0101900) 山西省应用基础研究项目(201601D011035)
【分类号】：TB565.1

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