复合式MEMS水听器的设计

发布时间：2018-02-16 20:51

本文关键词： 频带复合式微机电系统(MEMS)水听器声能流联合算法左右舷模糊 ANSYS workbench 振膜　出处：《压电与声光》2017年02期 　论文类型：期刊论文

【摘要】：针对微机电系统(MEMS)仿生矢量水听器工作频带窄,灵敏度低,且存在左、右舷模糊问题,设计了高灵敏宽频带复合式MEMS水听器。矢量部分选择4个不同纤毛长度的仿生矢量水听器组成阵列,各结构间采用并联方式,工作频带拓宽到4 800Hz,并分割出4个不同的频率段,在拓宽了频响带宽的同时保证了灵敏度。标量部分采用低频电容水声传感器进行优化设计,空腔注满硅油、振膜开设声学孔,提高振膜承压性的同时保证了良好的动态性能。后续对标量和矢量信息进行声能流联合算法处理,解决了左右舷模糊的难题。该文主要介绍了复合式MEMS水听器的工作原理,结合ANSYS workbench进行了仿真验证。选用玻璃片及绝缘衬底上的硅(SOI)片键合的单片集成复合结构工艺设计,在玻璃上定义空腔及下电极,在SOI片上定义十字梁和振膜,整体结构一致性好,定位精度高。
[Abstract]:The bionic vector hydrophone for MEMS has a narrow working band, low sensitivity, and fuzzy starboard and left side problems. A high sensitive broadband composite MEMS hydrophone is designed. Four bionic vector hydrophones with different cilia lengths are selected in the vector part to form an array. The parallel mode is used among the structures, the working band is widened to 4 800 Hz, and four different frequency bands are divided. In the scalar part, the low frequency capacitive underwater acoustic sensor is used to optimize the design, the cavity is filled with silicone oil, and the diaphragm is filled with acoustic holes. The acoustic energy flow algorithm for scalar and vector information is used to solve the problem of indistinct port and port side. The working principle of compound MEMS hydrophone is introduced in this paper. Combined with ANSYS workbench, the monolithic integrated composite structure was designed, which was bonded on glass and insulating substrate. The cavity and lower electrode were defined on glass, and cross beam and diaphragm were defined on SOI chip. The whole structure is consistent and the positioning accuracy is high.
【作者单位】：中北大学仪器科学与动态测试教育部重点实验室;中北大学电子测试技术重点实验室;
【基金】：山西省应用基础研究基金资助项目(201601D011035) 国家自然科学基金资助项目(61127008) 国家重点研发基金资助计划(2016YFC0101900) 山西省研究生教育创新基金资助项目(2016BY122)
【分类号】：TB565.1

【相似文献】