爪型干式真空泵的优化设计

发布时间：2018-02-21 05:26

本文关键词： 爪型干式真空泵转子型线有限元分析轻量化设计磁流体密封　出处：《中北大学》2017年硕士论文　论文类型：学位论文

【摘要】：伴随着工业5.0的到来,工业上对真空泵的需求与日俱增,使用者对其要求也越来越高。爪型干式真空泵是众多干式真空泵中的一种,目前被广泛应用到航天、半导体、制药、化工等行业。由于国内对爪型干式真空泵的研究工作起步比较晚,因此国内市场所使用的高端泵仍然需要从外国进口,因此价格也明显的高于国外。为了满足高新技术产业和特殊使用场合的需求,国内有多所高校和科研院所致力于开发、研究爪型干式真空泵。本论文以爪型干式真空泵为研究对象,对单级爪型干式真空泵的整体结构,转子型线设计以及密封问题等内容进行了深入的研究和探讨。主要完成了以下工作:(1)论文介绍了国内外针对干式真空泵的一些研究现状,阐述了干式真空泵的概念和分类以及爪型干式真空泵的结构、工作原理和工作过程;(2)对爪型干式真空泵的整体结构和关键零部件进行了设计。主要包括泵腔的设计、转子的设计、传动轴的设计、校核及受力分析,密封结构设计、齿轮以及电机的选择;(3)设计了一种新型爪型干式真空泵转子。现有的爪型干式真空泵转子在位于爪顶与爪顶端圆弧相连接的地方会有两个尖点,完成的是点与曲线相啮合的工作过程,这种工作过程会产生很多弊端。针对这个问题本论文巧妙的将尖点去掉,使得转子在工作过程中避免了点与曲线的啮合,从而完成圆弧与曲线相啮合的工作过程;通过轻量化设计使得转子重量减轻了1/4到1/5,有效地减少了原材料消耗并使其在工作中降低了能耗;对转子的动平衡进行了分析,并通过Pro/e软件验证了改进后转子的平衡性;把爪型干式真空泵工作特性模拟的压力场、温度场的分布作为加载条件,利用有限元分析软件得到了在介质压力作用下转子所受的应力情况。(4)将新型磁流体密封技术应用到爪型干式真空泵中。介绍了新型磁流体密封技术的原理,设计了新型磁流体密封结构并装配到爪型干式真空泵上,利用ANSYS有限元分析软件对所设计的新型磁流体密封结构进行了磁场分析,验证了新型磁流体密封技术满足密封耐压要求,并通过对比试验验证了磁流体密封技术性能的优越性。通过对爪型干式真空泵进行优化设计,其性能得到显著提升,为后续研究出更优良的爪型干式真空泵奠定了基础。
[Abstract]:With the arrival of industry 5.0, the demand for vacuum pumps in industry is increasing day by day, and users are demanding more and more. Claw dry vacuum pumps are one of many dry vacuum pumps, which are widely used in aerospace, semiconductors and pharmaceuticals. Chemical industry and other industries. Because the domestic research work on the claw type dry vacuum pump started relatively late, the high-end pumps used in the domestic market still need to be imported from abroad. Therefore, the price is obviously higher than that of abroad. In order to meet the needs of high and new technology industries and special use occasions, there are many universities and scientific research institutes in China devoted to development. This paper takes the claw type dry vacuum pump as the research object, and analyzes the whole structure of the single stage claw dry vacuum pump. The rotor profile design and sealing problems are deeply studied and discussed. The following work is accomplished: 1) the paper introduces some research status of dry vacuum pump at home and abroad. The concept and classification of the dry vacuum pump and the structure, working principle and working process of the claw type vacuum pump are described. The integral structure and key parts of the claw type dry vacuum pump are designed, including the design of the pump cavity. Rotor design, drive shaft design, check and force analysis, seal structure design, A new type of claw type dry vacuum pump rotor is designed. The existing claw type dry vacuum pump rotor has two sharp points at the point where the claw top is connected to the claw top arc. The work process of point and curve meshing is completed, which will produce many disadvantages. This paper cleverly removes the cusp, which makes the rotor avoid the meshing between point and curve in the working process. The rotor weight is reduced by 1/4 to 1 / 5 by lightweight design, which effectively reduces the consumption of raw materials and reduces the energy consumption in the work. The dynamic balance of the rotor is analyzed. The balance of the improved rotor is verified by Pro/e software, and the pressure field and temperature field distribution of the claw dry vacuum pump are taken as the loading conditions. By using finite element analysis software, the stress of rotor under the action of medium pressure is obtained. The new magnetic fluid seal technology is applied to the claw type dry vacuum pump. The principle of the new magnetic fluid seal technology is introduced. A new type of magnetic fluid seal structure is designed and assembled to the claw type dry vacuum pump. The magnetic field analysis of the new magnetic fluid seal structure is carried out by using ANSYS finite element analysis software. It is verified that the new type of magnetofluid seal technology can meet the requirements of seal pressure, and the superiority of magnetic fluid seal technology is verified by contrast test. By optimizing the design of claw type dry vacuum pump, its performance is greatly improved. It lays a foundation for the further study of a better claw type dry vacuum pump.
【学位授予单位】：中北大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB752

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