基于像散原理的薄膜厚度测量系统设计与实现

发布时间：2018-03-11 00:18

本文选题：薄膜　切入点：厚度测量　出处：《西南科技大学》2017年硕士论文　论文类型：学位论文

【摘要】：薄膜厚度是衡量薄膜质量的主要指标。目前薄膜种类越来越多,薄膜产品正朝着高精度方向发展。针对现有薄膜厚度测量方法难以实现大厚度薄膜测量、成本高等问题。本文利用光驱内的DVD激光头,研究开发了基于像散原理的薄膜厚度测量系统,实验结果表明,本系统厚度测量范围为100~800μm,重复测量精度为8μm,测量薄膜尺寸为140mm×50mm。论文主要研究内容如下:(1)像散位移传感器的研制。针对像散光学系统中光电探测器输出的微弱电压信号,设计了信号放大电路和基于K60微处理器的聚焦误差信号采集处理系统,实现了像散光学系统输出信号到聚焦误差信号的转换。通过模拟仿真分析得出了像散光学系统参数对像散位移传感器测量精度和量程的影响规律。设计并实现了测量精度和量程可灵活改变的像散位移传感器。(2)扫描抖动误差实时校正。扫描式测量系统通常包含直线运动平台,然而直线运动平台一般存在10μm以上的随机抖动误差,将引起系统测量误差扩大。本文针对直线运动平台随机抖动误差,提出了双像散位移传感器扫描抖动误差实时校正方案。实验结果表明,通过该方案误差实时校正后直线运动平台的随机抖动误差由原来的12μm降低到了2μm。(3)薄膜厚度测量系统设计与实现。详细对比分析了扫描式和阵列式两种薄膜厚度测量方案优缺点,并结合直线运动平台随机抖动误差实时校正,设计并实现了基于像散原理的双传感器扫描式薄膜厚度测量系统。实验结果表明,系统厚度测量范围为100~800μm,重复测量精度为8μm,测量薄膜尺寸为140mm×50mm。
[Abstract]:Film thickness is the main index to measure the film quality. At present, there are more and more kinds of films, and the film products are developing towards high precision. In this paper, a thin film thickness measurement system based on astigmatic principle is developed using DVD laser head in optical drive. The experimental results show that, The thickness measurement range of the system is 100 渭 m, the precision of repeated measurement is 8 渭 m, and the measurement film size is 140 mm 脳 50 mm. The main contents of this paper are as follows: 1) the development of astigmatic displacement sensor. The signal amplification circuit and the signal acquisition and processing system based on K60 microprocessor are designed. The conversion from astigmatic optical system output signal to focusing error signal is realized. The influence of astigmatic optical system parameters on the measurement accuracy and range of astigmatic displacement sensor is obtained by simulation and analysis, and the measurement accuracy and range of astigmatic displacement sensor are designed and realized. The scanning jitter error is corrected in real time by using a flexible astigmatic displacement sensor. The scanning measurement system usually includes a linear motion platform. However, there is a random jitter error of more than 10 渭 m in the linear motion platform, which will cause the system measurement error to be enlarged. In this paper, the random jitter error of the linear moving platform is discussed. A real-time correction scheme for scanning jitter error of dual-astigmatic displacement sensor is proposed. The experimental results show that, The random jitter error of the linear motion platform is reduced from 12 渭 m to 2 渭 m.m3) after the real-time correction of the scheme error. The advantages and disadvantages of the scanning and array thickness measurement schemes are compared and analyzed in detail. Combined with the real-time correction of random jitter error of linear motion platform, a double-sensor scanning film thickness measurement system based on astigmatism principle is designed and implemented. The experimental results show that, The thickness measurement range of the system is 100 渭 m, the precision of repeated measurement is 8 渭 m, and the film size is 140 mm 脳 50 mm.
【学位授予单位】：西南科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212;O484.5

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