Mg-Al共掺层数对ZnO薄膜性能的影响

发布时间：2018-03-23 19:10

  本文选题：溶胶凝胶法　切入点：Mg-Al共掺杂　出处：《陶瓷学报》2017年01期

【摘要】：采用溶胶凝胶法在石英衬底上制备了Mg-Al共掺的ZnO薄膜,研究了不同旋涂层数对ZnO薄膜微观结构、表面形貌以及光学性能的影响。利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、紫外-可见分光光度计(UV-VIS)、PL光致发光光谱仪对样品进行了表征与测试。实验结果表明:Mg-Al共掺后的ZnO薄膜均呈现六角纤锌矿结构且沿C轴择优取向生长,薄膜层数的增加能够有效提升薄膜的结晶质量。同时Mg-Al共掺杂能够极大地拓宽ZnO薄膜在近红外光谱域的光透过率,平均透过率超过85%。
[Abstract]:Mg-Al co-doped ZnO films were prepared on quartz substrates by sol-gel method. The microstructure of ZnO films with different number of spin coatings was studied. The influence of surface morphology and optical properties. The samples were characterized and tested by X-ray diffractometer, scanning electron microscope (SEM), UV-Vis spectrometer (UV-VIS) PL photoluminescence spectrometer. The experimental results show that the sample is co-doped with% Mg-Al. All of the ZnO films showed hexagonal wurtzite structure and preferred orientation along the C axis. The increase in the number of layers can effectively improve the crystalline quality of the films, and Mg-Al co-doping can greatly broaden the optical transmittance of ZnO films in the near infrared spectrum domain, the average transmittance is more than 8550.
【作者单位】： 景德镇陶瓷大学机械电子工程学院;
【基金】：国家自然基金项目(61464005,51562015) 江西省科技支撑计划资助项目(2010BGA01100) 江西省对外合作资助项目(20132BDH80025,20151BDH80031) 江西省主要学科学术和技术带头人培养计划项目(20123BCB22002) 景德镇陶瓷大学创新创业训练计划项目(212050-008)
【分类号】：O614.241;TB383.2
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本文编号：1654792