真空装置数据采集系统开发研究

发布时间：2018-03-24 06:00

本文选题：真空装置　切入点：数据采集　出处：《合肥工业大学》2014年硕士论文

【摘要】：真空镀膜机是典型的真空应用装置，是机电仪结合的杰出代表。当今的真空镀膜装置都配备了良好的自动控制系统。随着真空装置对数据采集的速度和精度的要求越来越高，为之配备性能优良的数据采集系统也提上了议事日程。研究和开发高速度、高精度数据采集系统对于真空装置安全生产、稳定运行、提高效率、降低劳动强度等，都具有积极的意义。本文介绍了镀膜机的总体结构、发展趋势，结合镀膜工艺流程，讨论了镀膜机数据采集系统的基本框架；介绍了虚拟仪器数据采集系统及LabVIEW的相关概念、组成结构、性能特点、发展趋势；分析了LabVIEW数据采集技术在镀膜机系统中的应用；设计了镀膜机运行中温度、真空度和流量的信号获取和变送电路；选用MP420数据采集卡作为被采集量与个人计算机的接口，构成了一个数据采集系统，实现了10通道数据采集；设计了基于LabVIEW的镀膜机运行过程数据采集系统监测程序，它包括：温度、真空度与流量的监测主模块，系统面板参数设定、控制按钮、结果显示等辅助模块。该程序具有多路采集、实时显示、存储管理等功能，，从而实现对镀膜机运行过程的实时监测，其采样速率可调，历史数据可查询。本文设计的虚拟仪器系统已经通过模拟运行。由于虚拟仪器的模块化、开放性、灵活性的特点以及关键在软件，所以其修改、更新或重置都是非常方便的，无需从头做起。
[Abstract]:The vacuum coating machine is a typical vacuum application device and an outstanding representative of the combination of machine and electricity. Nowadays, the vacuum coating device is equipped with a good automatic control system. The research and development of high speed and high precision data acquisition system for vacuum device safety production, stable operation, improve efficiency, reduce labor intensity, etc. Are of positive significance. This paper introduces the general structure and development trend of the coating machine, discusses the basic frame of the data acquisition system of the coating machine combined with the coating process, and introduces the related concepts and structure of the virtual instrument data acquisition system and LabVIEW. The application of LabVIEW data acquisition technology in the coating machine system is analyzed, and the signal acquisition and transmission circuit of temperature, vacuum and flow rate in the operation of the coating machine is designed. The MP420 data acquisition card is selected as the interface between the collected data and the personal computer, and a data acquisition system is constructed, which realizes the data acquisition of 10 channels, and designs the monitoring program of the data acquisition system of the film plating machine running process based on LabVIEW. It includes: temperature, vacuum and flow monitoring main module, system panel parameter setting, control button, result display and other auxiliary modules. The program has the functions of multi-channel acquisition, real-time display, storage management, etc. Thus the real-time monitoring of the operation process of the coating machine is realized. The sampling rate is adjustable and the historical data can be queried. The virtual instrument system designed in this paper has been running through simulation. Because of its modularization, openness, flexibility and the key to software, it is very convenient to modify, update or reset the virtual instrument without having to start from scratch.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB75

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