气体介质、压强及校准方法对真空漏孔漏率的影响

发布时间：2018-04-09 20:39

本文选题：漏率　切入点：校准　出处：《真空科学与技术学报》2017年12期

【摘要】：真空标准漏孔作为标定检漏仪或被测量漏率的参考标准,在核工业、航天航空等领域得到了广泛应用。本文利用氦质谱检漏仪和定容法对标准漏孔(铭牌漏率:2.3×10-6Pa·m3/s,He,23℃)进行校准,以为快速地定量研究聚变材料中氘(D2)或氦(He)行为提供有用的参考。研究结果表明,漏孔漏率随入口端气体压强的增大而增大,并与漏孔两端气体介质压强的平方差呈线性递增关系。同一入口压强下,D2的漏率高于He,且漏率之间的差异随压强增加而变大。同一条件下,定容法和氦质谱检漏仪测得漏孔中示漏气体He的漏率值基本相等,但示漏气体为D2时,氦质谱检漏仪测得的漏率值高于定容法。研究还给出了氦质谱检漏仪测量示漏气体D2时漏孔漏率的修正关系式。
[Abstract]:As a reference standard for calibrating leak detector or measuring leakage rate, the vacuum standard leak hole has been widely used in nuclear industry, aerospace and other fields.The calibration of standard leak (nameplate leakage rate: 2.3 脳 10-6Pa m ~ (3 / s)) is carried out by means of helium mass spectrometer and constant volume method, which provides a useful reference for the rapid and quantitative study of deuterium D _ 2 or helium he in fusion materials.The results show that the leakage rate increases with the increase of gas pressure at the inlet end and increases linearly with the square difference between the gas pressure at both ends of the hole.At the same inlet pressure, the leakage rate of D _ 2 is higher than that of He. and the difference between leakage rates increases with the increase of pressure.Under the same condition, the leakage rate of helium mass spectrometer is equal to that of helium mass spectrometer, but when the leakage gas is D2, the leakage rate measured by helium mass spectrometer is higher than that measured by constant volume method.A modified formula for leak rate of leak gas D2 by helium mass spectrometer is presented.
【作者单位】：表面物理与化学重点实验室;四川大学原子与分子物理研究所;中国工程物理研究院;
【基金】：国家磁约束聚变计划专项(No.2015GB109002) 中国工程物理研究院科学技术发展基金(No.2014B0301048)
【分类号】：TB774

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