CrTiAlCN系列薄膜的结构及其水基切削液中的摩擦学特性研究

发布时间：2018-04-22 13:27

本文选题：CrTiAlCN薄膜 + 结构　；参考：《南京航空航天大学》2017年硕士论文

【摘要】：本文采用非平衡磁控溅射系统,在316L不锈钢和单晶硅片上沉积了CrAlN、CrTiAlN、CrTiAlCN薄膜,在M2高速钢上沉积了不同C元素含量的CrTiAl(C)N薄膜,使用磁控溅射双靶共溅射系统在M2高速钢和单晶硅片上沉积了不同C元素含量的CrAl(C)N薄膜。对薄膜的元素组成、形貌结构、硬度及其与基材之间的结合力等进行了表征分析,探讨了各薄膜的沉积参数或摩擦条件的改变对薄膜在空气或切削液中的摩擦学特性的影响,通过对摩擦试验结果来探讨摩擦磨损机理。结果表明:(1)CrAlN基薄膜中主要存在的相为fcc-CrN,在CrAlN薄膜中依次掺入Ti、C元素后,薄膜的硬度和膜基结合力均有所下降,硬度从1233HV0.01降至1110HV0.01;在空气中,三种薄膜的摩擦系数均在0.85~1.1之间,磨损率均随着对磨速度的提高而升高;在水基切削液中,摩擦系数和薄膜的磨损率随着对磨速度的提高而降低,当对磨速度为0.4m/s时,CrTiAlCN薄膜摩擦系数最低为0.24,而CrAlN薄膜因具有较好的机械性能,磨损率最低,为1.43×10~(-7)mm~3/Nm。(2)CrAlCN薄膜中晶体的主要成分是CrN/Cr_2N,而C元素含量的升高,薄膜中CrN/Cr_2N成分逐渐减少。随着C元素含量的增加,CrAlCN薄膜的硬度先增加后减小,在C元素含量为50.3 at.%时,薄膜的硬度最高,为1095HV0.01。在空气和水基切削液的条件下,薄膜的摩擦系数都随着CrAlCN薄膜中C元素含量的增加有降低的趋势,在空气中,摩擦系数从1.06降低到0.34,而在水基切削中,摩擦系数从0.60降低到0.11;空气和水基切削液条件下,CrAlCN4薄膜都具有最低的磨损率,分别为为2.78×10~(-5) mm~3/Nm和1.62×10~(-5) mm~3/Nm。(3)CrTiAl(C)N薄膜中所含晶体的主要成分是面心立方CrN/TiN/AlN,且随着C元素含量的增加,衍射峰强度逐渐降低;随着C元素含量的增加,CrTiAl(C)N薄膜的硬度先增加后减小,在C元素含量为22.5 at.%时,薄膜的硬度最高,为2999HV0.05,CrTiAl(C)N薄膜的结合力则随着C元素含量的增加逐渐减小,CrTiAlN薄膜的膜基结合力最高,为76N;CrTiAl(C)N薄膜与小球在空气和水基切削液中对磨的摩擦系数随着C元素含量的增加均有所降低,在空气中,从1.22降低至0.37,而在水基切削中,摩擦系数从0.60降至0.53。在空气和水基切削液中,CrTiAlCN5薄膜的均有最低的磨损率,分别为9.83×10~(-7) mm~3/Nm和1.15×10~(-6) mm~3/Nm。
[Abstract]:In this paper, CrAlN- CrTiAlN- CrTiAlCN thin films were deposited on 316L stainless steel and single crystal silicon substrates by unbalanced magnetron sputtering system, and CrTiAl(C)N films with different C content on M2 high speed steel were deposited. CrAl(C)N thin films with different C content were deposited on M2 high speed steel and single crystal silicon substrates by magnetron sputtering dual target co-sputtering system. The composition, morphology, hardness and adhesion between the films and the substrate were characterized and analyzed. The effects of deposition parameters or friction conditions on the tribological properties of the films in air or cutting fluid were discussed. The friction and wear mechanism is discussed by means of friction test results. The results show that the main phase in the CrAlN films is fcc-CrN, and the hardness and adhesion of the films decrease from 1233HV0.01 to 1110HV0.01, and the friction coefficient of the three films is between 0.851.1.In air, the hardness and adhesion of the films are decreased from 1233HV0.01 to 1110HV0.01.In the air, the friction coefficient of the three kinds of films is between 0.85 and 1.1.The hardness of the films is decreased from 1233HV0.01 to 1110HV0.01.In the air, the friction coefficient of the three kinds of films is between 0.85 and 1.1. The wear rate increased with the increase of grinding speed, and the friction coefficient and the wear rate of film decreased with the increase of grinding speed in water based cutting fluid. When the grinding speed is 0.4m/s, the friction coefficient of CrTiAlCN film is the lowest 0.24, while the wear rate of CrAlN film is the lowest because of its good mechanical properties. The main component of the crystal in the film is CrN / Cr2N, but with the increase of C element content, the CrN/Cr_2N component in the film decreases gradually. The hardness of CrAlCN films increased first and then decreased with the increase of C element content. When the content of C element was 50.3 at.%, the hardness of the films was the highest (1095HV0.01). Under the condition of air and water based cutting fluid, the friction coefficient of the film decreases with the increase of C element content in CrAlCN film. In air, the friction coefficient decreases from 1. 06 to 0. 34, while in water based cutting, the friction coefficient decreases from 1. 06 to 0. 34, while in water based cutting, the friction coefficient decreases from 1. 06 to 0. 34. The friction coefficient was reduced from 0.60 to 0.11.The wear rate of CrAlCN4 thin films was the lowest in air and water based cutting fluids, which were 2.78 脳 10 ~ (-5) mm~3/Nm and 1.62 脳 10 ~ (5) mm~3/Nm.(3)CrTiAl(C)N respectively. The main composition of the crystals contained in the films was face-centered cubic CrN / TiN / AlN, and with the increase of the content of C element, With the increase of C element content, the hardness of CrTiAlN films first increased and then decreased. When the content of C element was 22.5 at.%, the hardness of the films was the highest. The adhesion of CrTiAlN thin film to 2999HV0.05CrTiAlN film decreases gradually with the increase of the content of C element, and the adhesion of CrTiAlN film to the ball decreases with the increase of the content of C element, and the friction coefficient of the film and the ball decreases with the increase of the content of C element in the air and water based cutting fluid, and the adhesion of the CrTiAlN film to the ball is decreased with the increase of the content of C element. In air, the friction coefficient decreases from 1.22 to 0.37, while in water-based cutting, the friction coefficient decreases from 0.60 to 0.53. The wear rates of CrTiAlCN5 thin films in air and water based cutting fluids were 9.83 脳 10 ~ (-7) mm~3/Nm and 1.15 脳 10 ~ (-1) mm ~ (-1) mm ~ (-1) Nm, respectively, and the wear rates were 9.83 脳 10 ~ (-7) mm~3/Nm and 1.15 脳 10 ~ (-1) mm ~ (-1) mm ~ (-1).
【学位授予单位】：南京航空航天大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.2;TG501.5

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