我国微纳几何量计量技术的研究进展

发布时间：2018-04-29 16:42

本文选题：微纳几何量 + 关键尺寸　；参考：《仪器仪表学报》2017年08期

【摘要】：随着微纳技术中材料和器件关键尺寸的减小以及几何结构复杂性的增加,给微纳尺度的精确测量带来了新的挑战。微纳几何量计量技术主要是研究微纳尺度下测量量值的准确一致,并实现量值溯源到国际长度基本单位的科学。为保证微纳技术的领先优势,国外先进国家一直高度重视微纳几何量计量技术的研究。目前,我国在微纳计量领域已成功研制了多种微纳几何量计量标准装置,并初步建立了我国自己的微纳计量溯源体系。对我国现有的微纳几何量计量技术与计量标准装置进行了回顾和介绍,并对我国微纳计量的未来发展做出了展望。
[Abstract]:With the decrease of the key dimensions of materials and devices and the increase of geometric complexity in micro and nano technology, new challenges are brought to the precise measurement of micro and nano scale. The measurement technique of micro and nano geometry is mainly to study the accuracy and consistency of measurement value at micro and nano scale, and to realize the science of tracing the value to the basic unit of international length. In order to ensure the leading advantage of micro-nano technology, advanced countries have always attached great importance to the research of micro-nano geometry measurement technology. At present, China has successfully developed a variety of micro-nano geometric measurement standard devices in the field of micro-nano metrology, and preliminarily established our own trace system of micro-nano metrology. This paper reviews and introduces the existing micro-nano geometry metering technology and metrology standard equipment in China, and makes a prospect for the future development of micro-nano measurement in our country.
【作者单位】：中国计量科学研究院;
【基金】：国家重点研发计划(2016YFF0200602);国家重点研发计划(2016YFF0200404)项目资助
【分类号】：TB92

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