超声波振动辅助多线锯加工设备开发及实验研究

发布时间：2018-05-09 01:37

本文选题：多线切割机 + 超声波振动　；参考：《浙江工业大学》2015年硕士论文

【摘要】：目前单、多晶硅等光电子材料已大量采用多线锯进行切片加工,但由于设备以及加工工艺复杂性,加工的晶片容易产生翘曲、崩边,钢丝也容易断线等现象,急需开发一种新型的加工工艺来解决传统多线切割机的加工问题,因此,研究振动辅助多线切割的加工工艺与设备具有重要意义。振动辅助多线切割是通过振动的作用改善切割时磨粒的运动状态及切削性能,能很好的解决普通多线切割的排屑、散热、断线等问题,使其加工得到的切片表面质量更高,损伤层的厚度大大降低,为实现更高精度的多线锯加工提供了1条新的方法。本课题通过多线切割的原理开发了一种新型多线切割加工设备,该设备搭载了超声波振动辅助装置,可很好的完成振动辅助多线切割任务,并对K9光学玻璃进行切割实验,实验结果验证了振动辅助多线锯的加工效果。本文的主要工作和成果如下:1、介绍了课题的研究背景和意义、多线切割机的工作原理和其走线原理图、游离磨料线切割和固着磨料线切割的加工机理、国内外多线锯加工设备的研究现状、超声波振动辅助多线锯切割的理论基础。2、根据实验要求的多线切割机设计指标和设计要求,设计出了具有超声波振动辅助系统的ZGD100A多线切割机,该部分包括多线切割机的结构总体设计方案和多线切割机控制系统总体设计方案,重点对加工系统、导轮系统、排线系统、进给系统、供浆系统、收放线系统、线张力控制装置、箱体的结构进行了具体的分析设计,通过SolidWorks软件建立了各个系统的三维模型图,完成了整机的虚拟装配,并且对主要的零部件进行了详细的强度校核。3、根据ZGD100A多线切割机的控制总体设计方案,完成了控制系统各功能模块的设计和选型,对各功能模块的作用和参数进行了说明。并对多线切割机的多电机速度同步控制和张力控制两个关键技术的程序设计进行了介绍说明。4、根据超声波振动系统的总体设计方案,完成了超声波电源选型、超声波换能器和超声波变幅杆的材料选择和结构设计,并根据密封和装配规则,完成了超声波振动台的虚拟装配,对超声波振动台的制造有非常重要的指导意义。5、通过实验验证了超声波振动辅助多线切割加工设备的合理性,得出了在相同的加工条件下,超声波振动辅助锯切加工优于普通锯切加工,且表面质量有明显的提升。
[Abstract]:At present, many optoelectronic materials, such as polysilicon, have been sliced by multi-wire saws. However, due to the complexity of equipment and processing technology, the processed wafers are prone to warp, collapse and wire breakage, etc. It is urgent to develop a new processing technology to solve the problem of traditional multi-wire cutting machine. Therefore, it is of great significance to study the processing technology and equipment of vibration assisted multi-wire cutting. Vibration-assisted multi-wire cutting is to improve the motion state and cutting performance of abrasive particles by vibration. It can solve the problems of chip removal, heat dissipation, wire breakage and so on, so that the surface quality of slicing can be improved. The thickness of the damaged layer is greatly reduced, which provides a new method for achieving higher precision multi-wire saw machining. Through the principle of multi-wire cutting, a new type of multi-wire cutting equipment is developed in this paper. The equipment is equipped with ultrasonic vibration auxiliary device, which can accomplish the task of vibration assisted multi-wire cutting, and carry on the experiment of K9 optical glass cutting. The experimental results verify the machining effect of vibration assisted multi-wire saw. The main work and results of this paper are as follows: 1. It introduces the research background and significance of the subject, the working principle of the multi-wire cutting machine and its schematic diagram, the machining mechanism of the free abrasive wire cutting and the fixed abrasive wire cutting. The research status of multi-wire saw processing equipment at home and abroad, the theoretical basis of ultrasonic vibration assisted multi-wire saw cutting, and the design index and design requirements of multi-wire cutting machine according to the experimental requirements, The ZGD100A multi-wire cutting machine with ultrasonic vibration auxiliary system is designed. This part includes the overall design scheme of the structure of the multi-wire cutting machine and the overall design of the control system of the multi-wire cutting machine, focusing on the machining system, the guide wheel system and the wire arrangement system. The feed system, slurry supply system, line collecting system, line tension control device and the structure of the box are analyzed and designed. The 3D model diagram of each system is established by SolidWorks software, and the virtual assembly of the whole machine is completed. According to the overall design scheme of ZGD100A multi-line cutting machine, the design and selection of each function module of the control system are completed, and the function and parameters of each function module are explained. The program design of two key technologies of speed synchronization control and tension control of multi-wire cutting machine is introduced. According to the overall design scheme of ultrasonic vibration system, ultrasonic power source selection is completed. The material selection and structure design of ultrasonic transducer and ultrasonic horn, and the virtual assembly of ultrasonic vibration table are completed according to the sealing and assembly rules. It has a very important guiding significance for the manufacture of ultrasonic vibration table. The rationality of ultrasonic vibration assisted multi-wire cutting processing equipment is verified by experiments, and it is concluded that under the same processing conditions, Ultrasonic vibration assisted sawing is superior to conventional sawing, and the surface quality is improved obviously.
【学位授予单位】：浙江工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TB559

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