硅—玻璃通道型标准漏孔制作及性能研究

发布时间：2018-05-16 08:01

本文选题：标准漏孔 + 通道　；参考：《合肥工业大学》2017年硕士论文

【摘要】：由于常用的漏孔不能准确反映泄漏气体的真实流动状态,且难以实现尺寸可控制作。近年来,新型标准漏孔制作及其应用的研究受到广泛关注,寻找尺寸可控、宽压强范围内气体分子流传输的新型漏孔元件成为真空科技领域的一个新的研究热点。本文提出以硅和硼硅玻璃为材料,利用干涉曝光、反应离子刻蚀以及阳极键合技术制作新型纳米级通道型标准漏孔,通过制作过程中工艺参数的调整控制漏孔的尺寸,经测量漏孔的特征尺寸为280nm。本文设计搭建了差压法漏率测量装置,利用该装置测量了氦气、氮气、氧气和氩气通过被测漏孔的漏率和流导。结果表明:对于氦气,流导在10~100kPa的压力范围内基本不变,而氮气、氧气和氩气的流导在10~60kPa的压力范围内基本不变,此时气体在漏孔中的流动状态为完全分子流;对于同一长度的漏孔,气体的流导与其分子质量平方根的倒数近似成正比;对于特定气体,漏孔的流导与其长度近似成反比。利用氦质谱检漏仪验证了测量的准确性,与差压法测量结果相比,相对误差低于11.64%。最后评估了装置测量漏孔漏率和流导的不确定度,得出其相对合成不确定度低于7.4%。本文制作的标准漏孔具有尺寸可控、流导恒定、漏率范围宽、标定简单等优点,且可根据氦气的标定结果预测其他非可凝性气体的流导。
[Abstract]:Because the leakage holes in common use can not accurately reflect the true flow state of the leaking gas, it is difficult to realize the dimension control. In recent years, the research on the fabrication and application of new standard holes has been paid more and more attention. It has become a new research hotspot in vacuum science and technology to find new leak elements with controllable size and wide pressure range. In this paper, using silicon and borosilicate glass as materials, using interference exposure, reactive ion etching and anodic bonding technology, a new type of nanometer channel standard leak is fabricated. The size of the leak is controlled by adjusting the process parameters. The characteristic size of the hole is 280 nm. In this paper, a differential pressure leakage rate measuring device is designed and built. The leakage rate and flow conductance of helium, nitrogen, oxygen and argon through the leak hole are measured by this device. The results show that for helium, the flow conductance is basically constant in the pressure range of 10~100kPa, while the flow conductance of nitrogen, oxygen and argon is basically unchanged in the pressure range of 10~60kPa, and the flow state of the gas in the leakage hole is a complete molecular flow. For a leak of the same length, the flow conductance of the gas is approximately proportional to the reciprocal of the square root of its molecular mass, and for a particular gas, the flow conductance of the leak is approximately inversely proportional to its length. The accuracy of the measurement is verified by using the helium mass spectrometer, and the relative error is lower than that of the differential pressure method. Finally, the uncertainty of leak rate and flow conductance measured by the device is evaluated, and the relative synthesis uncertainty is lower than 7.4. The standard leak hole made in this paper has the advantages of controllable size, constant flow conductivity, wide leakage range and simple calibration, and can be used to predict the flow conductance of other non-coagulable gases based on the calibration results of helium gas.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB774

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