类富勒烯薄膜的载荷依赖摩擦滞后行为研究

发布时间：2018-05-24 23:21

本文选题：类富勒烯薄膜 + 力学性能　；参考：《表面技术》2017年09期

【摘要】：目的研究类富勒烯薄膜(FL-C:H)的载荷相关性摩擦滞后行为。方法采用直流等离子体化学气相沉积技术(DC-PECVD)在硅基底上制备了FL-C:H薄膜,通过场发射扫描电镜(FE-SEM)、X射线光电子能谱(XPS)、高分辨透射电镜(HRTEM)和拉曼光谱仪分别表征了薄膜的厚度、元素结合能状态以及微观结构,利用纳米压痕仪测定了薄膜的硬度及弹性恢复,借助往复摩擦磨损试验机考察了不同频率时变载荷条件下的摩擦滞后行为。结果以CH4和H2为前躯体制备的FL-C:H薄膜具有良好的机械性能,硬度和弹性模量分别为23.42 GPa和162.27 GPa,弹性恢复高达~82%。所制备薄膜与GCr15球配偶摩擦时,表现出良好的摩擦学性能,在循环载荷条件下表现出摩擦滞后行为。结论 FL-C:H薄膜在循环载荷条件下的摩擦滞后现象与所对应的频率有关。主要是由于大气环境下,摩擦界面处H2O、O2吸附造成氧化反应和磨损的共同作用。
[Abstract]:Aim to study the load-dependent friction hysteresis behavior of fullerene-like thin film FL-C: h. Methods FL-C:H thin films were prepared on silicon substrates by DC plasma chemical vapor deposition technique. The thickness of the films was characterized by field emission scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy. The hardness and elastic recovery of the films were measured by nano-indentation instrument. The friction hysteresis behavior under different frequency time-varying loads was investigated by means of reciprocating friction and wear tester. Results the FL-C:H films prepared with CH4 and H2 as precursors have good mechanical properties. The hardness and modulus of elasticity are 23.42 GPa and 162.27 GPA, respectively. The elastic recovery is as high as 82%. The film exhibits good tribological properties and frictional hysteresis behavior under cyclic load. Conclusion the friction hysteresis of FL-C:H films under cyclic loading is related to the corresponding frequency. It is mainly due to the oxidation reaction and wear caused by the adsorption of H _ 2O _ 2 at the friction interface in atmospheric environment.
【作者单位】：兰州理工大学石油化工学院;中国科学院兰州化学物理研究所固体润滑国家重点实验室;
【基金】：国家自然科学基金(51205383) 甘肃省自然科学基金(1501RJZA012) 中国科学院“西部之光”;中国科学院“青年促进会”(2017459) 重庆大学机械传动国家重点实验室开放课题(SKLMT-KFKT-201402)~~
【分类号】：TB383.2

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