基于静电场原理微纳力值测量与标准传递技术研究

发布时间：2018-06-20 14:16

本文选题：微纳力值 + 静电场　；参考：《天津大学》2014年硕士论文

【摘要】：微纳力值的准确计量在新材料、新技术领域有着迫切需求。目前国际上尚无统一的微力测量与溯源标准,导致各种类型微力传感器性能标定滞后。课题旨在通过分析研究,建立10-4~10-8N范围内的微力计量体系。本文探索了基于静电场原理的微纳力值测量和力值标准传递方案,完成了实验平台搭建,实验证明了测量原理和方案的可行性。论文的主要研究内容和创新如下:1.系统分析了国内外在微纳力值计量领域的研究现状。针对当前研究的不足,确定本课题的研究方向和内容。2.研究了基于静电场原理进行力值测量的原理,通过对各种传感器的比较采用变面积圆柱形电容传感器作为力发生单元。分析了力值计算的关键参量——电容梯度的计算公式和影响因素。设计了基于机器视觉的电容梯度测量方案。3.根据力值测量精度需要,设计了差动式柔性铰链作为力值传递机构。基于铰链的数学模型,分析了静态刚度和动态刚度,并提出了优化方案。4.搭建了力值测量与溯源标准装置,介绍了各个模块的功能。硬件上进行了设备、构件的选择与实现;程序设计上进行了算法优化和人机交互界面开发。在该装置基础上进行了电容梯度测量和力值测量实验,符合设计目标。5.进行微纳力值测量系统中不确定度分析。包括地面振动、空气扰动等A类不确定度和电容梯度、电压源、激光尺等引起的B类不确定度。在测量2mg法码产生的力时,力值相对不确定度2.6%,达到课题目标要求。6.探索了基于微力标准装置的力值标准传递技术。分析原子力显微镜悬臂梁作为微力传感器在力学特性上的优势,采用标定悬臂梁弹性系数的方法进行力值标准传递。对三种不同尺寸的AFM梁进行实验标定,重复性误差小于0.2N/m,证明了方案的可行性。
[Abstract]:There is an urgent need for accurate measurement of micro-nano force in new materials and new technologies. At present, there is no uniform micro-force measurement and traceability standard in the world, which leads to various kinds of micro-force sensor performance calibration lag. The purpose of this paper is to establish a micro force measurement system in the range of 10-4 and 10-8 N through analysis and research. In this paper, the measurement and standard transfer scheme of micro-nana force based on electrostatic field principle is explored, and the experimental platform is built, and the feasibility of the measurement principle and scheme is proved by experiment. The main contents and innovations of this paper are as follows: 1. The research status in the field of micro-nano-force measurement at home and abroad is systematically analyzed. In view of the deficiency of current research, determine the research direction and content of this subject. The principle of force measurement based on electrostatic field is studied. The variable area cylindrical capacitance sensor is used as the force generating unit through the comparison of various sensors. The formula and influencing factors of capacitance gradient, the key parameter of force calculation, are analyzed. The capacitance gradient measurement scheme based on machine vision is designed. The differential flexure hinge is designed as the force transfer mechanism according to the precision of force value measurement. Based on the mathematical model of hinge, the static and dynamic stiffness are analyzed, and the optimized scheme. A standard device for force measurement and traceability is built, and the functions of each module are introduced. The selection and realization of equipment and components are carried out in hardware, and the optimization of algorithm and the development of man-machine interface are carried out in program design. On the basis of the device, the experiments of capacitance gradient measurement and force value measurement are carried out, which are in line with the design objective. The uncertainty analysis in the measurement system of micro-nano force is carried out. It includes class A uncertainties such as ground vibration, air disturbance and capacitance gradient, voltage source, laser ruler and so on. When measuring the force produced by 2mg code, the relative uncertainty of force value is 2.6. The technology of force standard transfer based on micro force standard device is explored. The advantage of atomic force microscope cantilever beam as a micro-force sensor in mechanical properties is analyzed. The method of calibrating the elastic coefficient of the cantilever beam is used to transfer the standard force value. Three kinds of AFM beams with different sizes are calibrated experimentally. The repeatability error is less than 0.2 N / m, which proves the feasibility of the scheme.
【学位授予单位】：天津大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TP212;TB931

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