溶胶-凝胶-蒸镀法制备高性能FTO薄膜
发布时间：2018-08-27 13:29
【摘要】：以SnCl_4·5H_2O为锡源,SnF_2为氟源,采用溶胶-凝胶-蒸镀法制备F掺杂的SnO_2透明导电氧化物薄膜(FTO薄膜).通过正交实验研究确定最佳反应温度、反应时间和蒸镀温度等制备条件.主要研究元素F的掺杂和膜的结构对FTO薄膜性能的影响,并采用傅里叶变换红外光谱仪、热重-差热分析、X射线衍射、高分辨透射电子显微镜和扫描电子显微镜等进行样品的性能表征.研究结果表明,当反应温度50?C、反应时间5 h、烧结(蒸镀)温度600?C、镀膜次数1次、而F/Sn=14 mol%时,FTO薄膜性能指数ΦTC最大,综合光电性能最优,表面电阻为14.7?·cm-1,平均透光率为74.4%.FTO薄膜内颗粒的平均粒径为20 nm,呈四方金红石型结构,F的掺入替代了部分的O,形成了SnO_(2-x)F_x晶体结构.F的掺杂量是影响FTO薄膜的主要因素,F过多或过少均不利于SnO_(2-x)F_x晶体的生长;FTO薄膜的结构、颗粒形状、大小等三维信息也是影响薄膜性能的因素,主要表现为分形维数越小,薄膜表面越平整,势垒越低,导电性能越好.
[Abstract]:F doped SnO_2 transparent conductive oxide thin films (FTO films) were prepared by sol-gel evaporation method with SnCl_4 5H_2O as tin source and SnFST2 as fluorine source. The optimum reaction temperature, reaction time and evaporation temperature were determined by orthogonal experiment. The influence of the doping of F and the structure of the film on the properties of FTO thin films was studied. The Fourier transform infrared spectroscopy (FTIR) was used to analyze the X-ray diffraction of FTO films by thermogravimetric differential thermal analysis (TG-DTA). The properties of the samples were characterized by high resolution transmission electron microscope (TEM) and scanning electron microscope (SEM). The results show that when the reaction temperature is 50 鈩，
本文编号：2207434
[Abstract]:F doped SnO_2 transparent conductive oxide thin films (FTO films) were prepared by sol-gel evaporation method with SnCl_4 5H_2O as tin source and SnFST2 as fluorine source. The optimum reaction temperature, reaction time and evaporation temperature were determined by orthogonal experiment. The influence of the doping of F and the structure of the film on the properties of FTO thin films was studied. The Fourier transform infrared spectroscopy (FTIR) was used to analyze the X-ray diffraction of FTO films by thermogravimetric differential thermal analysis (TG-DTA). The properties of the samples were characterized by high resolution transmission electron microscope (TEM) and scanning electron microscope (SEM). The results show that when the reaction temperature is 50 鈩，
本文编号：2207434
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