新型智能微位移主动隔振控制系统的研发

发布时间：2018-10-14 12:55

【摘要】：微位移主动隔振控制系统在精密仪器、微纳米设备的微位移主动隔振中有着广阔的应用前景。本文在NI PXI数据采集系统和BK激振器的基础上，设计了一种由作动器、传感器和控制器组成的新型智能微位移主动隔振系统，搭建了相应的实验平台，提出将有源噪声控制的相关原理应用到智能微位移主动隔振控制中，开发了在LabVIEW软件环境下整个系统的数据采集和F-XLMS控制算法的程序，分别在正弦、扫频和随机激励信号下进行了微位移主动隔振仿真和实验研究，主要创新点如下： 1）提出了一种由作动器、传感器和控制器组成的新型智能微位移主动隔振控制系统，该系统是一个完全的闭环系统，，具有较高的控制精度、响应速度和稳定性； 2）建立了层叠式压电作动器的理论模型，以压电方程为基础推导出作动器厚度变形量表达式，获得了作动器控制电压计算公式； 3）探索了适用于微位移主动隔振的控制理论与算法，将有源噪声控制技术的F-XLMS算法应用到主动隔振控制中，使用LabVIEW软件开发了整个系统的数据采集和F-XLMS算法控制程序，为微位移主动隔振系统提供了软件支撑； 4）搭建了微位移主动隔振控制系统的硬件实验平台，BK激振器为该实验平台提供初级振动激励信号，NI PXI数据采集系统采集初级振动信号和受控后误差信号，并输出控制电压，为微位移主动隔振系统提供硬件支撑； 5）进行了微位移主动隔振的Matlab/Simulink理论模型仿真和实验验证研究，分别将正弦、扫频、随机三种典型振动激励信号作为仿真和实验的初级信号，仿真和实验结果验证了本系统对微位移主动隔振的有效性，为精密仪器和微纳米设备的智能微位移主动隔振系统应用奠定基础。
[Abstract]:The active vibration isolation control system of micro displacement has a broad application prospect in precision instruments and micro-nano devices. On the basis of NI PXI data acquisition system and BK vibration exciter, a new intelligent micro-displacement active vibration isolation system composed of actuators, sensors and controllers is designed in this paper. The principle of active noise control is applied to the intelligent micro-displacement active vibration isolation control, and the program of data acquisition and F-XLMS control algorithm is developed in the LabVIEW software environment. The simulation and experimental study of active vibration isolation with micro-displacement under frequency sweep and random excitation signals are carried out. The main innovations are as follows: 1) A kind of actuator is proposed. The intelligent micro-displacement active vibration isolation control system composed of sensors and controllers is a complete closed-loop system with high control accuracy, response speed and stability. 2) the theoretical model of the stacked piezoelectric actuator is established. Based on the piezoelectric equation, the expression of the thickness deformation of the actuator is derived, and the formula for calculating the control voltage of the actuator is obtained. 3) the control theory and algorithm suitable for active vibration isolation of micro-displacement are explored. The F-XLMS algorithm of active noise control technology is applied to active vibration isolation control. The data acquisition and F-XLMS algorithm control program of the whole system is developed by using LabVIEW software, which provides the software support for the active vibration isolation system of micro-displacement. 4) the hardware experiment platform of micro-displacement active vibration isolation control system is built. The BK exciter provides the primary vibration excitation signal for the experimental platform. The, NI PXI data acquisition system collects the primary vibration signal and the controlled error signal. And output control voltage to provide hardware support for the micro-displacement active vibration isolation system. 5) the Matlab/Simulink theoretical model simulation and experimental verification of micro-displacement active vibration isolation are carried out. Three kinds of random vibration excitation signals are used as the primary signals of simulation and experiment. The results of simulation and experiment verify the effectiveness of the system for active vibration isolation of micro-displacement. It lays a foundation for the application of intelligent micro-displacement active vibration isolation system in precision instruments and micro-nano devices.
【学位授予单位】：青岛理工大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB535.1

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