一种压强稳定的多级真空差分系统
发布时间：2018-10-23 09:54
【摘要】：上海光源软X射线自由电子激光器光束线主要用于X射线的传输与诊断,为了减少光子吸收,其传输环境须为无窗洁净的超高真空系统。气体通量衰减器和气体探测器是光束线诊断区域的关键设备,二者均需要充入一定量的气体,且工作精度依赖于气体压强的稳定度。文中介绍了一种具有压强反馈调节功能的多级真空差分系统直接过渡至其他超高真空设备,可在2.5 m内实现7个量级以上的差分比。
[Abstract]:The beam line of Shanghai soft X-ray free electron laser is mainly used for X-ray transmission and diagnosis. In order to reduce photon absorption, the transmission environment of Shanghai soft X-ray free electron laser must be a windowless and clean ultra-high vacuum system. The gas flux attenuator and the gas detector are the key equipment in the beam line diagnosis area. Both of them need to be filled with a certain amount of gas, and the working accuracy depends on the stability of the gas pressure. In this paper, a multistage vacuum differential system with pressure feedback regulation function is introduced, which can directly transfer to other ultra-high vacuum equipment. It can achieve more than 7 orders of magnitude difference ratio in 2.5 m.
【作者单位】： 同济大学;中国科学院上海应用物理研究所;
【分类号】：TB75
[Abstract]:The beam line of Shanghai soft X-ray free electron laser is mainly used for X-ray transmission and diagnosis. In order to reduce photon absorption, the transmission environment of Shanghai soft X-ray free electron laser must be a windowless and clean ultra-high vacuum system. The gas flux attenuator and the gas detector are the key equipment in the beam line diagnosis area. Both of them need to be filled with a certain amount of gas, and the working accuracy depends on the stability of the gas pressure. In this paper, a multistage vacuum differential system with pressure feedback regulation function is introduced, which can directly transfer to other ultra-high vacuum equipment. It can achieve more than 7 orders of magnitude difference ratio in 2.5 m.
【作者单位】： 同济大学;中国科学院上海应用物理研究所;
【分类号】：TB75
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